IP Library Granted Patent US 8,461,533
Granted Patent B2
US 8,461,533 · App. 13/238,551 · Granted Jun 11, 2013

Radiation sensor

Inventor: Ewan Findlay (Dollar, GB)
Assignee: STMicroelectronics (Research & Development) Ltd
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,461,533
App. No.
13/238,551
Granted
Jun 11, 2013
Kind
B2
Abstract

A radiation sensor includes first and second pixels with a radiation absorption filter positioned over the first pixel and an interference filter positioned over both the first and second pixels. The combined spectral response of the absorption filter and the first pixel has a first pixel pass-band and a first pixel stop-band. The spectral response of the interference filter has an interference filter pass-band which is substantially within the first pixel pass-band for radiation incident on the interference filter at a first angle of incidence, and substantially within the first pixel stop-band for radiation incident on the interference filter at a second angle of incidence greater than the first angle of incidence.

Claims (47)

1. A radiation sensor comprising:

first and second pixels;

a radiation absorption filter positioned over the first pixel but not the second pixel, wherein a combined spectral response of the radiation absorption filter and the first pixel has a first pixel pass-band and a first pixel stop-band; and

an interference filter positioned over the first and second pixels, wherein a spectral response of the interference filter has an interference filter pass-band which is substantially within the first pixel pass-band for radiation incident on the interference filter at a first angle of incidence, and substantially within the first pixel stop-band for radiation incident on the interference filter at a second angle of incidence greater than the first angle of incidence.

2. The radiation sensor of claim 1 wherein the interference filter pass-band has a full-width-half-maximum bandwidth which is less than a full-width-half-maximum bandwidth of the first pixel pass-band.

3. The radiation sensor of claim 1 wherein the interference filter pass-band has a full-width-half-maximum bandwidth which is less than a full-width-half-maximum bandwidth of the first pixel stop-band.

4. The radiation sensor of claim 1 wherein the interference filter pass-band has a full-width-half-maximum bandwidth which is less than a full-width-half-maximum bandwidth of the first pixel pass-band and the full-width-half-maximum bandwidth of the interference filter pass-band is less than a full-width-half-maximum bandwidth of the first pixel stop-band.

5. The radiation sensor of claim 1 wherein the interference filter pass-band has a full-width-half-maximum bandwidth which is less than a 10 dB bandwidth of the first pixel pass-band.

6. The radiation sensor of claim 1 wherein the interference filter pass-band has a full-width-half-maximum bandwidth which is less than a 10 dB bandwidth of the first pixel stop-band.

7. The radiation sensor of claim 1 wherein the interference filter pass-band has a full-width-half-maximum bandwidth which is less than a 10 dB bandwidth of the first pixel pass-band and the full-width-half-maximum bandwidth of the interference filter pass-band is less than a 10 dB bandwidth of the first pixel stop-band.

8. The radiation sensor of claim 1 wherein the radiation absorption filter is a high-pass filter configured to transmit radiation having a wavelength above a predetermined threshold.

9. The radiation sensor of claim 1 wherein the first and second angles of incidence are less than 90°.

10. The radiation sensor of claim 1 further comprising a lens substantially positioned over the first and second pixels.

11. The radiation sensor of claim 10 wherein the lens is a Fresnel lens.

12. The radiation sensor of claim 10 wherein the lens comprises one of a plurality of lenslets or a diffractive optical element positioned over the first and second pixels.

13. The radiation sensor of claim 10 wherein the lens is positioned between the interference filter and the first and second pixels.

14. The radiation sensor of claim 1 wherein the interference filter comprises a pair of opposing planar reflectors.

15. The radiation sensor of claim 14 wherein at least one of the planar reflectors is only partially reflective.

16. The radiation sensor of claim 1 wherein the interference filter is provided on a substrate.

17. The radiation sensor of claim 16 wherein the interference filter is formed from a coating applied to the substrate.

18. The radiation sensor of claim 1 wherein the radiation absorption filter comprises an organic resist applied to a sensing surface of the first pixel.

19. The radiation sensor of claim 1 wherein the first pixel stop-band substantially comprises wavelengths between 513 nm and 608 nm.

20. The radiation sensor of claim 1 wherein the first pixel pass-band comprises wavelengths exceeding 700 nm.

21. The radiation sensor of claim 1 wherein the interference filter comprises a second interference filter pass-band, the interference filter being configured such that the second interference filter pass-band is substantially within the first pixel stop-band for radiation incident on the interference filter at the first angle of incidence.

22. A combined proximity and ambient light sensor comprising:

first and second pixels;

a radiation absorption filter positioned over the first pixel but not the second pixel, wherein a combined spectral response of the radiation absorption filter and the first pixel has a first pixel pass-band and a first pixel stop-band; and

an interference filter positioned over the first and second pixels, wherein a spectral response of the interference filter has an interference filter pass-band which is substantially within the first pixel pass-band for radiation incident on the interference filter at a first angle of incidence, and substantially within the first pixel stop-band for radiation incident on the interference filter at a second angle of incidence greater than the first angle of incidence.

23. The combined proximity and ambient light sensor of claim 22 further comprising a radiation source.

24. The combined proximity and ambient light sensor of claim 23 wherein the radiation source is one of a light emitting diode or a semi-conductor laser diode.

25. The combined proximity and ambient light sensor of claim 23 wherein the radiation source has an emission spectrum having a full-width-half-maximum line-width which is greater than a full-width-half-maximum line-width of the interference filter pass-band.

26. The combined proximity and ambient light sensor of claim 22 wherein the first pixel is used for proximity sensing.

27. The combined proximity and ambient light sensor of claim 26 wherein the second pixel is used for ambient light sensing.

28. The combined proximity and ambient light sensor of claim 27 wherein the first pixel is used in combination with the second pixel for ambient light sensing.

29. A method of manufacturing a radiation sensor including first and second pixels, the method comprising:

positioning a radiation absorption filter over the first pixel; and

positioning an interference filter over the first and second pixels,

wherein a combined spectral response of the radiation absorption filter and the first pixel has a first pixel pass-band and a first pixel stop-band and

wherein positioning the interference filter comprises providing the interference filter with an interference filter pass-band which is substantially within the first pixel pass-band for radiation incident on the interference filter at a first angle of incidence, and substantially within the first pixel stop-band for radiation incident on the interference filter at a second angle of incidence greater than the first angle of incidence.

30. The method of claim 29 wherein positioning the radiation absorption filter comprises depositing the radiation absorption filter on a sensing surface of the first pixel by lithography.

31. The method of claim 29 wherein positioning the interference filter comprises integrally forming the interference filter with the first and second pixels.

32. The method of claim 29 wherein positioning the interference filter comprises forming the interference filter by applying a coating to a substrate mounted above the first and second pixels.

33. The method of claim 29 further comprising:

providing a plurality of first and second pixels;

positioning a radiation absorption filter over each of the first pixels; and

positioning an interference filter over the first and second pixels.

34. The method of claim 29 wherein the first and second pixels are provided as part of a pixel array.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 21, 2011
From: FINDLAY, EWAN
To: STMICROELECTRONICS (RESEARCH & DEVELOPMENT) LIMITED
Reel/Frame 026942/0110 →
Priority Claims (1)
GB 1020024.4 · Nov 25, 2010 · national
Continuity (1)
Related Publication 20120132809A1 · May 31, 2012