Ultrasonic actuator
The invention relates to an ultrasonic actuator, preferably for use in an ultrasonic motor, in the form of a piezoelectric plate with a length L, height H and thickness t, wherein the piezoelectric plate has a lateral plane of symmetry Sq, a longitudinal plane of symmetry Sl and at least two main surfaces, and the piezoelectric plate comprises at least two generators symmetrically disposed with respect to plane of symmetry Sq for generating ultrasonic standing waves. According to the invention, the piezoelectric plate has a shape that includes at least eight lateral surfaces, wherein at least two of the lateral surfaces are working surfaces for contacting of elements to be driven, and at least two of the lateral surfaces are holding surfaces for holding the piezoelectric plate, and the remaining lateral surfaces are free surfaces, wherein at least four free surfaces are arranged at an identical angle α with respect to the longitudinal plane of symmetry Sl and/or at an identical angle φ with respect to the lateral plane of symmetry Sq.
1. Ultrasonic actuator, preferably for use in an ultrasonic motor, in the form of a piezoelectric plate ( 1 ) with a length L, a height H and a thickness t, wherein the piezoelectric plate ( 1 ) has a lateral plane of symmetry Sq, a longitudinal plane of symmetry Sl and at least two main surfaces ( 2 ), and the piezoelectric plate ( 1 ) comprises at least two generators ( 7 , 8 ) arranged symmetrically with respect to the plane of symmetry Sq for generating ultrasonic standing waves,
characterized in that
the piezoelectric plate ( 1 ) has a shape that includes at least eight lateral faces, wherein at least two of the lateral faces are working surfaces ( 4 ) provided to contact elements to be driven, and at least two of the lateral faces are holding surfaces ( 5 ) provided to hold the piezoelectric plate ( 1 ), and the remaining lateral faces are free surfaces ( 6 ), wherein at least four free surfaces ( 6 ) are arranged at a same angle α with respect to the longitudinal plane of symmetry Sl and/or at a same angle φ with respect to the lateral plane of symmetry Sq.
2. Ultrasonic actuator according to claim 1 ,
characterized in that
the working surfaces ( 4 ) have a width n and the holding surfaces ( 5 ) have a width m, and that the ratio L to n and/or the ratio H to m is in the range between 1.1 and 9, and is preferably approximately equal to 5.
3. Ultrasonic actuator according to claim 1 ,
characterized in that
the ratio L to H is in the range between 1.5 and 3, and is preferably approximately equal to 2.
4. Ultrasonic actuator according to claim 1 ,
characterized in that
the ratio L to t is in the range between 5 and 15, and is preferably approximately equal to 10.
5. Ultrasonic actuator according to claim 1 ,
characterized in that
the free surfaces ( 6 ) have section-wise a concave and/or convex shape.
6. Ultrasonic actuator according to claim 1 ,
characterized in that
each of the generators ( 7 , 8 ) comprises an excitation electrode ( 20 ) and a general electrode ( 21 ), which are arranged on the main surfaces ( 2 ) of the piezoelectric plate ( 1 ), and that a piezoelectric ceramics is arranged between the excitation electrode ( 20 ) and the general electrode ( 21 ).
7. Ultrasonic actuator according to claim 1 ,
characterized in that
each of the generators ( 7 , 8 ) comprises several layers of excitation electrodes ( 20 ), general electrodes ( 21 ) and layers of piezoelectric ceramics ( 22 ) each arranged there between, wherein said layers ( 22 ) are arranged in parallel to the main surfaces ( 2 ) of the piezoelectric plate ( 1 ).
8. Ultrasonic actuator according to claim 1 ,
characterized in that
at least one of the working surfaces ( 4 ) comprises at least one friction element ( 34 ) or at least one slide ( 35 ).
9. Ultrasonic actuator according to claim 1 ,
characterized in that
at least one of the working surfaces ( 4 ) comprises at least section-wise a guide groove ( 42 ).
10. Ultrasonic actuator according to claim 1 ,
characterized in that
the friction element ( 34 ) and/or the slide ( 35 ) and/or the guide groove ( 42 ) has/have at least section-wise an abrasion-resistant layer ( 37 ) on the surface.
11. Ultrasonic actuator according to claim 1 ,
characterized in that
at least one of the holding surfaces comprises at least one fixing element ( 44 ) or at least section-wise a fixing groove ( 46 ).
12. Ultrasonic actuator according to claim 2 ,
characterized in that
the ratio L to H is in the range between 1.5 and 3, and is preferably approximately equal to 2.
13. Ultrasonic actuator according to claim 2 ,
characterized in that
the ratio L to t is in the range between 5 and 15, and is preferably approximately equal to 10.
14. Ultrasonic actuator according to claim 3 ,
characterized in that
the ratio L to t is in the range between 5 and 15and is preferably approximately equal to 10.
15. Ultrasonic actuator according to claim 2 ,
characterized in that
the free surfaces ( 6 ) have section-wise a concave and/or convex shape.
16. Ultrasonic actuator according to claim 3 ,
characterized in that
the free surfaces ( 6 ) have section-wise a concave and/or convex shape.
17. Ultrasonic actuator according to claim 4 ,
characterized in that
the free surfaces ( 6 ) have section-wise a concave and/or convex shape.
18. Ultrasonic actuator according to claim 2 ,
characterized in that
each of the generators ( 7 , 8 ) comprises an excitation electrode ( 20 ) and a general electrode ( 21 ), which are arranged on the main surfaces ( 2 ) of the piezoelectric plate ( 1 ), and that a piezoelectric ceramics is arranged between the excitation electrode ( 20 ) and the general electrode ( 21 ).
19. Ultrasonic actuator according to claim 3 ,
characterized in that
each of the generators ( 7 , 8 ) comprises an excitation electrode ( 20 ) and a general electrode ( 21 ), which are arranged on the main surfaces ( 2 ) of the piezoelectric plate ( 1 ), and that a piezoelectric ceramics is arranged between the excitation electrode ( 20 ) and the general electrode ( 21 ).
20. Ultrasonic actuator according to claim 4 ,
characterized in that
each of the generators ( 7 , 8 ) comprises an excitation electrode ( 20 ) and a general electrode ( 21 ), which are arranged on the main surfaces ( 2 ) of the piezoelectric plate ( 1 ), and that a piezoelectric ceramics is arranged between the excitation electrode ( 20 ) and the general electrode ( 21 ).