Pad structure and test method
The present invention discloses a pad structure and a method for testing a integrated circuit. The structure includes the first pads and the second pads, where the first pads are distributed over a peripheral portion of the integrated circuit and connected with lead-out wires of the integrated circuit, and the second pads are connected with a metal line at a circuit portion in the integrated circuit and are sized larger than the minimum characteristic dimension of the metal line and of the integrated circuit and smaller than the size of the first pads. The pad structure and method can position a test portion with improved efficiency. Correspondingly, a probe can be used to position the test portion with improved accuracy as well.
1. A pad structure, comprising a plurality of first pads and a plurality of second pads, wherein the first pads are distributed over a peripheral portion of the integrated circuit and connected with lead-out wires of the integrated circuit, and the second pads are connected in parallel with an across-layer metal line at a circuit portion in the integrated circuit and are sized larger than the minimum characteristic dimension of the metal line and that of the integrated circuit and smaller than the size of the first pads, where the metal line is to be tested by using the second pads, and the across-layer metal line crosses at least two layers.
2. The pad structure according to claim 1 , wherein the second pads are single-layered metal pads, and the single-layered metal pads are composed of the same metal as the layer of the metal line at the circuit portion in the integrated circuit.
3. The pad structure according to claim 1 , wherein the second pads are structured in a stack consisted of one or more layers of metal pads and vias, and the metal pads at the lowest layer in the stack structure are connected in parallel with the metal line at a corresponding layer at the circuit portion in the integrated circuit.
4. The pad structure according to claim 1 , wherein the second pads are structured in a stack consisted of one or more layers of metal pads and vias, and the metal pads at the same layer in the stack structure as the metal line at the circuit portion in the integrated circuit are connected with the metal line, while the remaining layers of metal pads float.
5. The pad structure according to claim 1 , wherein the second pads are micro pads and the size of the micro pads is larger than 0.1 μm.
6. The pad structure according to claim 5 , wherein the size of the second pads ranges from 1 μm to 40 μm.
7. The pad structure according to claim 6 , wherein the size of the second pads ranges from 1 μm to 10 μm.
8. The pad structure according to claim 6 , wherein the size of the second pads ranges from 10 μm to 40 μm.
9. A method for testing an integrated circuit with the pad structure according to any one of claims 1 to 8 , comprising: probing and measuring first pads by a probe suitable for the first pads to acquire corresponding electrical parameters; and probing and measuring second pads at a specific test portion in the integrated circuit by a nano-probe or normal probe to acquire corresponding electrical parameters.
10. The method according to claim 9 , wherein when probing and measuring a metal line in the integrated circuit, the nano-probe is applied on both adjacent second pads in the test portion which are connected in parallel with the metal line to perform the probing and measuring sequentially.
11. The method according to claim 10 , wherein the probing and measuring are performed as an automatic test.
12. The method according to claim 9 , wherein when probing and measuring a metal line in the integrated circuit, the nano-probe is applied on the second pads in the test portion which are connected in parallel with the metal line to perform the probing and measuring in a dichotomy way.
13. The method according to claim 12 , wherein the probing and measuring are performed as an automatic test.
14. The method according to claim 9 , wherein the first pads are firstly probed and measured to test proper functioning of the entire integrated circuit chip, and if improper functioning of the integrated circuit chip is found from the test, the nano-probe is subsequently used to test the second pads in the integrated circuit to position a circuit portion resulting in improper functioning.
15. The pad structure according to claim 1 , wherein the second pads are structured in a stack consisted of one or more layers of metal pads and vias, one second pad is connected in parallel with an overlying metal layer at one end of the across-layer metal line, another second pad is connected in parallel with an underlying metal layer at the other end of the across-layer metal line, and the second pads thus structured in a stack are used in an electro migration test in which the second pads are used to acquire corresponding electrical parameters.
16. The pad structure according to claim 1 , wherein the across-layer metal line is a multiple fingers metal line.