Acceleration sensor
There is provided an acceleration sensor including: a weight portion; plural fixed portions formed above a bottom plate around a periphery of the weight portion; a beam portion coupling the fixed portions and the weight portion, and holding the weight portion at a position separated from the bottom plate; a detection portion provided at the beam portion and detecting deformation of the beam portion; a frame portion provided so as to project out from the bottom plate and surround the fixed portions at a position separated from the fixed portions; and a lid portion of plate shape that seals an opening of the frame portion.
1. An acceleration sensor comprising:
a weight portion;
a plurality of fixed portions formed above a bottom plate around a periphery of the weight portion;
a beam portion coupling the fixed portions and the weight portion, and holding the weight portion at a position separated from the bottom plate;
a detection portion provided at the beam portion and detecting deformation of the beam portion;
a frame portion provided so as to project out from the bottom plate and surround the fixed portions at a position separated from the fixed portions;
a lid portion of plate shape that seals an opening of the frame portion;
a fixed portion connection pad provided at an end portion of the fixed portion and transmitting an electrical signal from the detection portion;
a first lid portion connection pad provided at the inside face of the lid portion and making contact with the fixed portion connection pad;
a second lid portion connection pad provided at the inside face of the lid portion and connected by wiring to the first lid portion connection pad;
a frame portion connection pad provided at the frame portion and making contact with the second lid portion connection pad; and
a bonding pad provided at the frame portion so as not to contact the lid portion and connected by wiring to the frame portion connection pad, for transmitting an electrical signal to outside of the acceleration sensor, wherein a plane of the beam portion facing the lid portion and a plane of the fixed portions facing the lid portion are in a same plane.
2. The acceleration sensor of claim 1 , wherein the wiring provided at the lid portion is a diffusion layer wiring line.
3. The acceleration sensor of claim 1 , wherein the bottom plate and the lid portion are glass substrates.
4. The acceleration sensor of claim 1 , wherein an outside of the frame portion is sealed with a sealing resin, and a sealing frame is provided to each of the frame portion and the lid portion to prevent the sealing resin from penetrating inside the frame portion.
5. An acceleration sensor comprising, on a wafer for forming devices:
a weight portion;
a plurality of fixed portions formed above a bottom plate around a periphery of the weight portion;
a beam portion coupling the fixed portion and the weight portion, and holding the weight portion at a position separated from the bottom plate;
a detection portion provided at the beam portion and detecting deformation of the beam portion;
a frame portion provided so as to project out from the bottom plate and surround the fixed portions;
a plate shaped wiring board that seals an opening in the frame portion;
a fixed portion connection pad provided at an end portion of the fixed portion and transmitting an electrical signal from the detection portion;
a first wiring board connection pad provided at the inside face of the wiring board and making contact with the fixed portion connection pad;
a second wiring board connection pad provided at the inside face of the wiring board and connected by wiring to the first wiring board connection pad;
a frame portion connection pad provided at the frame portion and making contact with the second wiring board connection pad; and
a post provided so as to pass through the wiring board, for transmitting an electrical signal from the second wiring board connection pad to outside of the wiring board, wherein the wafer is diced at the outside of the frame portion to form devices.
6. An acceleration sensor according to claim 5 , wherein the wiring board is a control IC.