Method of manufacturing a flexible circuit electrode array
Polymer materials make useful materials as electrode array bodies for neural stimulation. They are particularly useful for retinal stimulation to create artificial vision. Regardless of which polymer is used, the basic construction method is the same. A layer of polymer is laid down. A layer of metal is applied to the polymer and patterned to create electrodes and leads for those electrodes. A second layer of polymer is applied over the metal layer and patterned to leave openings for the electrodes, or openings are created later by means such as laser ablation. Hence the array and its supply cable are formed of a single body. A method for manufacturing a flexible circuit electrode array, comprises: a) depositing a metal trace layer on an insulator polymer base layer; b) applying a layer of photoresist on said metal trace layer and patterning said metal trace layer and forming metal traces on said insulator polymer base layer; and c) activating said insulator polymer base layer and depositing a top insulator polymer layer and forming one single insulating polymer layer with said base insulator polymer layer; wherein the insulator polymer layers were treated at a temperature from 80-150° C. and then at a temperature from 230-350° C.
1. A method for manufacturing a flexible electrode array, comprising:
a) depositing and curing an insulator polymer base layer;
b) depositing a metal trace layer on a surface of said insulator polymer base layer;
c) applying a layer of photoresist on said metal trace layer and patterning said metal trace layer and forming metal traces on said insulator polymer base layer; and
d) activating said surface of said insulator polymer base layer and depositing a top insulator polymer layer and forming one single insulating polymer layer with said base insulator polymer layer; wherein the insulator polymer layers were treated at a temperature from 80-150° C. and then at a temperature from 230-350° C., and
e) imparting a permanent approximately semispherical curve into the resulting structure molding the structure in the desired shape, which approximates the shape of the target neural tissue, and heating the structure to a temperature of 230-400° C., so that the pressure of the precurved surface against the neural tissue is uniform across the surface of the array.
2. The method according to claim 1 , wherein the insulator polymer layers were treated at a temperature from 90-120° C. and then at a temperature from 270-330° C.
3. The method according to claim 1 , wherein said second treatment is carried out by ramping up at 2-4° C./min to 245-350° C., keeping at 250-350° C. for 10-40 min and ramping down.
4. The method according to claim 1 , wherein said shaping of the structure is carried out at 300 to 375° C.
5. The method according to claim 4 , wherein said ramping down takes 2-4 h.
6. The method according to claim 1 , wherein said polymer base layer and said polymer top layer are deposited by vapor deposition.
7. The method according to claim 1 , wherein said polymer base layer and said polymer top layer are applied by spin-coating as polyamic acid solution and the polyimide layer is obtained by curing the polyamic acid solution.
8. The method according to claim 1 , wherein said metal trace layer is patterned by photolithography and wet etching.
9. The method according to claim 1 , wherein activating of said insulator polymer base layer is carried out by etching the surface of said base polymer layer by RIE and deimidizing the surface of said base polymer layer.
10. The method according to claim 1 , wherein deimidizing the surface of said base polymer layer is carried out by sequential treatments with KOH and HCl.
11. The method according to claim 1 , wherein activating of said insulator polymer base layer is carried out by etching the surface of said base polymer layer by RIE in a plasma containing 80% to 90% O2 and 10% to 20% CF4.
12. The method according to claim 1 , wherein said first treatment is carried out in 5-15 mm and the second treatment 1.5-4 h.
13. The method according to claim 12 , wherein said first treatment is carried out in 8-12 min and the second treatment is 1.8-3 h.
14. A method of making a flexible circuit electrode array adapted for neural stimulation, comprising:
depositing and curing a polymer base layer;
depositing metal traces including electrodes suitable to stimulate neural issue on a surface of said polymer base layer;
activating said surface of said polymer base layer
depositing a polymer top layer on said polymer base layer and said metal traces yielding a flexible circuit electrode array;
imparting an approximately semispherical permanent curve into the resulting structure by molding the structure in the desired shape, which approximates the shape of the target neural tissue, and heating the structure to a temperature of 230-400° C., so that the pressure of the precurved surface against the neural tissue is uniform across the surface of the array; and
providing a slit along the length axis of said flexible circuit electrode array.