Method for fabricating nanogap and nanogap sensor
The present invention relates to a method of fabricating a nanogap and a nanogap sensor, and to a nanogap and a nanogap sensor fabricated using the method. The present invention relates to a method of fabricating a nanogap and a nanogap sensor, which can be realized by an anisotropic etching using a semiconductor manufacturing process. According to the method of present invention, the nanogap and nanogap sensor can be simply and cheaply produced in large quantities.
1. A nanogap sensor for detecting variations of an analysis object in electrical characteristics, comprising:
a substrate having V-shaped section thereon, the V-shaped section including a top width at a top portion of the substrate and a bottom width at a bottom portion of the substrate in such a configuration that the bottom width has a nano-scaled gap size of several nanometers to several hundreds of nanometers;
an oxide layer on a surface of the substrate including both sidewalls of the V-shaped section opposite to each other, thereby decreasing the width of the V-shaped section; and
a pair of electrodes on the oxide layer extending to both of the sidewalls of the V-shaped section to a top surface of the substrate, respectively, the analysis object being attached to each of the electrodes close to the bottom width of the V-shaped section, respectively.
2. The nanogap sensor according to claim 1 , wherein the sensor detects variation in chemical characteristics of an analysis object.
3. The nanogap sensor according to claim 1 , wherein the sensor detects variation in electrochemical characteristics of an analysis object.
4. The nanogap sensor according to claim 1 , wherein the sensor detects variation in biological characteristics of an analysis object.
5. The nanogap sensor according to claim 1 , wherein the analysis object is attached to the electrode through a linker attached to a surface of the electrode of the nanogap sensor.
6. The nanogap sensor according to claim 1 , wherein the analysis object is a nucleotide, protein, antigen or antibody, or an enzyme or substrate thereof.
7. The nanogap sensor according to claim 6 , wherein the antigen is PSA which is a prostate cancer marker.
8. The nanogap sensor according to claim 1 , wherein a linker for bonding an antibody is attached to a surface of an electrode of the sensor.
9. The nanogap sensor according to claim 8 , wherein the linker is a protein-G, an N-end of which is tagged with cysteine, or a fragment of protein-G, wherein said fragment of said protein-G includes an antibody bonding region of said protein.
10. The nanogap sensor according to claim 9 , wherein the linker is a fragment including B1 and B2 regions of protein-G, an N-end of which is tagged with three cysteines.
11. The nanogap sensor according to claim 8 , wherein the sensor includes an antibody bonded to the linker.
12. The nanogap sensor according to claim 9 , wherein the electrode is made of gold.