Image sensor devices and methods for manufacturing the same
Disclosed is a method for forming an image sensor device. First, a lens is provided, and a first sacrificial element is then formed on the lens. Subsequently, an electromagnetic interference layer is formed on the lens and the first sacrificial element, and the first sacrificial element and the electromagnetic interference layer thereon are removed to form an electromagnetic interference pattern having an opening exposing a selected portion of the lens. A second sacrificial element is formed in the opening to cover a center region of the selected portion of the lens, while a peripheral region of the selected portion of the lens remains exposed. Next, a light-shielding layer is formed on the electromagnetic interference pattern, the second sacrificial element, and the peripheral region of the selected portion of the lens. Thereafter, the second sacrificial element and the light-shielding pattern thereon are removed to expose the center region of the selected portion of the lens as a light transmitting region.
1. A method for forming an image sensor device, comprising:
providing a photo sensor having a lens thereon;
forming a first sacrificial element on the lens;
forming an electromagnetic interference layer on the lens and the first sacrificial element;
removing the first sacrificial element and the electromagnetic interference layer on the first sacrificial element to form an electromagnetic interference pattern having an opening exposing a selected portion of the lens;
forming a second sacrificial element in the opening to cover a center region of the selected portion of the lens, while a peripheral region of the selected portion of the lens remains exposed;
forming a light-shielding layer on the electromagnetic interference pattern, the second sacrificial element, and the peripheral region of the selected portion of the lens; and
removing the second sacrificial element and the light-shielding layer on the second sacrificial element, to expose the center region of the selected portion of the lens to serve as a light transmitting region.
2. The method as claimed in claim 1 , wherein the step of removing the second sacrificial element and the light-shielding layer on the second sacrificial element forms a light-shielding pattern on the peripheral region of the selected portion of the lens, and on a top surface and a sidewall of the electromagnetic interference pattern.
3. The method as claimed in claim 1 , further comprising cleaning the light transmitting region and the light-shielding layer surface after the step of removing the second sacrificial element and the light-shielding layer on the second sacrificial element.
4. The method as claimed in claim 1 , wherein the lens has a planar upper surface.
5. The method as claimed in claim 1 , wherein the lens has a curved upper surface.
6. The method as claimed in claim 1 , wherein the step of removing the first sacrificial element and the electromagnetic interference layer on the first sacrificial element comprises:
subjecting an energy to the first sacrificial element to swell the first sacrificial element until bursting, wherein the first sacrificial element is an energy-induced swelling material.
7. The method as claimed in claim 1 , wherein the step of removing the first sacrificial element and the electromagnetic interference layer on the first sacrificial element comprises a laser cutting.
8. The method as claimed in claim 1 , wherein the step of removing the second sacrificial element and the light-shielding layer on the second sacrificial element comprises:
subjecting an energy to the second sacrificial element to swell the second sacrificial element until bursting, wherein the second sacrificial element is an energy-induced swelling material.
9. The method as claimed in claim 1 , wherein the step of removing the second sacrificial element and the light-shielding layer on the second sacrificial element comprises a laser cutting.
10. The method as claimed in claim 1 , wherein the photo sensor aligns to the light transmitting region.