Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic apparatus, and radio timepiece
A piezoelectric vibrating piece includes a pair of vibration arm portions that is placed in a row in a width direction; a base portion to which proximal end sides in the pair of vibration arm portions in an extending direction are connected; and weight metal films that are formed on outer surfaces of the vibration arm portions, wherein the weight metal films are formed in positions that avoid regions of tip portions in the vibration arm portions in a longitudinal direction.
1. A piezoelectric vibrating piece comprising:
a base portion;
a pair of vibration arm portions extending from the base portion and adjacent to one another in a width direction,
the pair of vibrating arm portions having proximal ends connected to the base portion and distal ends away from the base portion in an extending direction; and
weight metal films on outer surfaces of the vibration arm portions,
wherein the weight metal films avoid the distal ends of the vibration arm portions, such that the distal ends are free of metal,
the weight metal films comprise a first rough frequency adjustment metal film and a second minute frequency adjustment metal film adjacent to the first rough frequency adjustment metal film, and
the first rough frequency adjustment metal film has a thickness greater than that of the second minute frequency adjustment metal film.
2. The piezoelectric vibrating piece according to claim 1 ,
wherein the weight metal films have a varying thickness through partial removal by laser irradiation, whereby frequencies of the vibration piece is adjusted so as have object frequencies, and
lengths of the distal ends in the extending direction are greater than an error in the partial removal by laser irradiation.
3. A piezoelectric vibrator comprising the piezoelectric vibrating piece according to claim 1 hermetically sealed in a package.
4. An oscillator comprising the piezoelectric vibrator according to claim 3 electrically connected to an integrated circuit as an oscillating element.
5. An electronic apparatus comprising the piezoelectric vibrator according to claim 3 electrically connected to a counter portion.
6. A radio timepiece comprising the piezoelectric vibrator according to claim 3 electrically connected to a filter portion.
7. The piezoelectric vibrating piece according to claim 1 , wherein the a first rough frequency adjustment metal film resides proximal to the distal ends and the second minute frequency adjustment metal film resides proximal to the base portion.
8. The piezoelectric vibrating piece according to claim 1 , wherein the first rough frequency adjustment metal film comprises at least two overlying metal films and the second minute frequency adjustment metal film comprises a single metal film.