Thermally tolerant anchor configuration for a circular cantilever
View Patent ↗A micro-electromechanical systems (MEMS) includes a substrate onto which a first conductive pad and a second conductive pad are formed. A conductive anchor coupled to the first conductive pad is a semi-circular frame that includes a first radial tab and a second radial tab. A conductive cantilever disc has a first end portion, a middle portion, and a second end portion. The first end portion of the conductive cantilever disc is coupled to the first radial tab and the second radial tab of the conductive anchor. The second end portion of the conductive cantilever disc is suspended over the second conductive pad with the middle portion being between the first end portion and the second end portion. A conductive actuator plate is formed onto the substrate at a location beneath the middle portion of the cantilever disc and between the first conductive pad and the second conductive pad.
1. A method of making a micro-electromechanical systems (MEMS) switch having a thermally tolerant anchor configuration, the method comprising:
providing a substrate;
forming a conductive anchor coupled to the substrate, wherein the conductive anchor is a substantially semi-circular frame that includes a first radial tab and a second radial tab;
forming a conductive cantilever disc having a first end portion, a middle portion, and a second end portion, wherein the first end portion is coupled to the first radial tab and the second radial tab of the conductive anchor such that the second end portion is suspended over the substrate; and
forming a conductive actuator plate on the substrate at a location beneath the middle portion of the conductive cantilever disc.
2. The method of claim 1 further including forming
a pair of strain relief slots being defined by inner surfaces within the first end portion of the conductive cantilever disc.
3. The method of claim 1 further including forming an overmold covering the MEMS switch and the substrate, wherein an integrated module comprising a plurality of active semiconductor devices and the MEMS switch is formed.
4. The method of claim 3 wherein at least one of the plurality of active semiconductor devices is formed directly underneath the MEMS switch in a device layer of the substrate.
5. The method of claim 1 further forming:
a multilayer encapsulation structure to provide an enclosure about the conductive anchor, the conductive cantilever disc, and the conductive actuator plate; and
an overmold covering the MEMS switch and the substrate, wherein an integrated module comprising a plurality of active semiconductor devices is formed.
6. The method of claim 5 wherein a space encapsulated by the multilayer encapsulation structure is filled with an inert gas.