Flow-rate controller, and regulator unit and valve unit used for the same
A highly versatile flow-rate controller that is easy to handle and a regulator unit and a valve unit used for the same are provided. The flow-rate controller includes a regulator unit having a regulator and a first pressure sensor, a valve unit having a second pressure sensor and a flow-rate control valve, and an orifice unit that is connected to the regulator unit and the valve unit in a detachable manner and that has a fluid channel and an orifice that connect to the regulator unit and the valve unit.
1. A flow-rate controller comprising:
a regulator unit with a fluid channel having a first body provided on a first base, a regulator provided on the first body, and a first pressure detection device;
a valve unit with a fluid channel having a second body provided on a second base, a flow-rate control valve provided on the second body, and a second pressure detection device; and
an orifice unit that is connected to the regulator unit and the valve unit in a detachable manner and that has a fluid channel and an orifice that connect to the regulator unit and the valve unit,
wherein the orifice unit includes,
a tube portion constituting the fluid channel,
an orifice integrally provided in the tube portion without a joint,
a joint structure that directly connects an end of the tube portion to the regulator unit or the valve unit,
wherein the orifice unit is not directly connected to any one of the first base and the second base,
wherein the joint structure and the tube portion are integrated,
wherein the first base includes a first fixing portion,
wherein the second base includes a second fixing portion,
wherein the first fixing portion and the second fixing portion are fixed to each other in a detachable manner, and wherein
the valve unit further comprises a compression coil spring interposed between a sliding part and cover flange that is designed to urge the sliding part in a direction of fluid force acting on a diaphragm needle.
2. A flow-rate controller according to claim 1 , wherein
the first base has first bolt through-holes formed at an end portion which is an opposite side from a side of the first fixing portion; and
the second base has second bolt through-holes formed at an end portion which is an opposite side from a side of the second fixing portion.