IP Library Granted Patent US 8,601,973
Granted Patent B2
US 8,601,973 · App. 12/203,117 · Granted Dec 10, 2013

Solution deposition assembly

Inventors: Yann Roussillon (Sunnyvale, CA); Piyaphant Utthachoo (San Jose, CA)
Assignee: Nanosolar, Inc.
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Quick Facts
Patent No.
US 8,601,973
App. No.
12/203,117
Granted
Dec 10, 2013
Kind
B2
Abstract

Methods and devices are provided for improved sputtering systems. In one embodiment of the present invention, a deposition system for use with a substrate, the system comprising a solution deposition apparatus; at heating chamber; and at least assembly for holding solution over the substrate to allow for a depth of at least about 0.5 microns to 10 mm.

Claims (32)

1. A deposition system for use with a substrate, the system comprising:

a solution deposition apparatus;

at least one heating chamber;

at least one assembly for holding solution over the substrate to allow for a depth of at least about 0.5 microns to 10 mm; and

a plurality of seals that define a volume where fluid can be held over the substrate, wherein the seals move with the substrate during at least a portion of substrate processing.

2. The system of claim 1 wherein the substrate comprises of a flexible material.

3. The system of claim 1 wherein the system includes multiple zones at different temperatures.

4. The system of claim 3 wherein certain zones have enclosed atmospheres.

5. The system of claim 1 wherein the seals move at the same rate as the substrate.

6. The system of claim 1 wherein the system is configured such that the substrate will be at a temperature less than a temperature of the solution or a dispersion to be deposited on the substrate.

7. The system of claim 1 wherein both the solution and the substrate are at substantially the same temperature.

8. The system of claim 1 wherein neither the solution or the substrate are heated and both are at ambient temperatures.

9. The system of claim 1 wherein the substrate is heated from ambient to about 60-90 C but the solution is at a still higher temperature.

10. The system of claim 1 wherein the substrate comprises of a metal foil.

11. The system of claim 1 wherein the solution comprises a precursor for forming a junction partner for a group IB-IIIA-VIA absorber layer.

12. The system of claim 1 wherein the solution comprises a precursor for forming a Group IIB-VIA junction partner.

13. The system of claim 1 wherein the solution comprises a precursor for forming a junction partner selected from the group consisting of: cadmium sulfide (CdS), zinc sulfide (ZnS), zinc hydroxide, zinc selenide (ZnSe).

14. The system of claim 1 wherein the solution comprises of a Group IIB ionic species is obtained from an aqueous solution of one or more of the following: sulfate, acetate, bromide, fluoride, chloride, iodide, hydroxide, nitrate, oxalate, citrate, phosphate, tungstate, or hydrates of the Group IIB species.

15. The system of claim 1 wherein the solution comprises of a Group VIA ionic species is obtained from an aqueous solution of one or more of the following: oxides, halides, sulfates, nitrates, or ureates of the Group VIA species.

16. The system of claim 1 wherein the solution has a pH of from about 9 to about 14.

17. The system of claim 1 wherein the solution has a pH of from about 11 to about 12.

18. The system of claim 1 wherein the assembly for holding solution is at least partially contained in the heating chamber.

19. A deposition system for use with a substrate, the system comprising:

a solution deposition apparatus;

at least one heating chamber;

at least one assembly for holding solution over the substrate to allow for a depth of at least about 0.5 microns to 10 mm; and

a plurality of seals that define a volume where fluid can be held over the substrate, wherein the seals move at the same speed as the substrate.

20. A deposition system for use with a substrate, the system comprising:

a solution deposition apparatus;

at least one heating chamber;

at least one assembly for holding solution over the substrate to allow for a depth of at least about 0.5 microns to 10 mm; and

a movable seal system that defines a volume over which fluid can be held over the substrate.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 16, 2014
From: ROUSSILLON, YANN; UTTHACHOO, PIYAPHANT
To: NANOSOLAR, INC.
Reel/Frame 033111/0199 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 21, 2014
From: NANOSOLAR, INC.
To: AERIS CAPITAL SUSTAINABLE IP LTD.
Reel/Frame 032502/0206 →
SECURITY AGREE,EMT Recorded Nov 15, 2012
From: NANOSOLAR, INC.
To: AERIS CAPITAL SUSTAINABLE IMPACT PRIVATE INVESTMENT FUND CAYMAN L.P.
Reel/Frame 029556/0418 →
Continuity (2)
Provisional Application 60969622 · Sep 1, 2007
Related Publication 20090120359A1 · May 14, 2009