Piezoelectric device and method for fabricating the same
A piezoelectric device includes a piezoelectric vibrating piece, a base plate, which has a connecting electrode on one principal surface and a mounting terminal on another principal surface, in a rectangular shape, and a lid plate. The another principal surface of the base plate includes a pair of sides that face one another. At least the pair of sides has a level difference portion depressed toward the one principal surface side and a castellation passing through from the another principal surface to the one principal surface. A wiring electrode extracted from the mounting terminal to the one principal surface of the base plate is at a part of the level difference portion and the castellation. The wiring electrode and the mounting terminal include a metal film formed by sputtering or vacuum evaporation and an electroless plating film formed on the metal film by electroless plating.
1. A surface mount type piezoelectric device, comprising:
a piezoelectric vibrating piece that includes a vibrator with a pair of excitation electrodes and an extraction electrode extracted from the pair of excitation electrodes, the vibrator vibrating at a predetermined vibration frequency;
a base plate in a rectangular shape that has one principal surface and another principal surface, a pair of connecting electrodes being on the one principal surface and electrically connecting to the extraction electrodes, a pair of mounting terminals being on the another principal surface, the piezoelectric device being to be mounted with the pair of mounting terminals; and
a lid plate that seals the vibrator, wherein
the another principal surface of the base plate includes a pair of sides that face one another, at least the pair of sides having a level difference portion and a castellation, the level difference portion being depressed toward the one principal surface side, the castellation passing through from the another principal surface to the one principal surface,
a wiring electrode is at a part of the level difference portion and the castellation, the wiring electrode being extracted from the mounting terminal to the one principal surface of the base plate, and
the wiring electrode and the mounting terminal include a metal film and an electroless plating film, the metal film being formed by sputtering or vacuum evaporation, the electroless plating film being formed on the metal film by electroless plating.
2. The piezoelectric device according to claim 1 , wherein
in the mounting terminal, a second metal film is formed on a surface of the metal film, and
the electroless plating film is formed on a surface of the second metal film.
3. The piezoelectric device according to claim 1 , wherein
the connecting electrode is formed of only the metal film.
4. The piezoelectric device according to claim 1 , wherein
the piezoelectric vibrating piece includes the vibrator, a framing portion, and a connecting portion, wherein
the framing portion surrounds the vibrator,
the connecting portion connects the vibrator and the framing portion together, and
the base plate and the lid plate are bonded together with the framing portion sandwiched between the base plate and the lid plate.
5. The piezoelectric device according to claim 1 , wherein
the electroless plating film includes a nickel layer, and
the nickel layer has a film thickness of 1 μm to 3 μm.