Apparatus and method for manufacturing vitreous silica crucible
There are provided an apparatus and a method for manufacturing a vitreous silica crucible which can prevent the deterioration of the inner surface property in the manufacturing process of a vitreous silica crucible. The apparatus includes a mold defining an outer shape of a vitreous silica crucible, and an arc discharge unit having electrodes and a power-supply unit, wherein each of the electrodes includes a tip end directed to the mold, the other end opposite to the tip end, and a bent portion provided between the tip end and the other end.
1. An apparatus for manufacturing a vitreous silica crucible, comprising a mold defining an outer shape of a vitreous silica crucible, a position displacement control unit for enabling displacement of the position state of the mold, and an arc discharge unit having electrodes and a power-supply unit, wherein
each of the electrodes includes a tip end directed to the mold, the other end opposite to the tip end, and a bent portion provided between the tip end and the other end so that an axis line at the other end and an axis line at the tip end do not overlap.
2. The apparatus of claim 1 , wherein an angle between the axis line at the tip end and the axis line at the other end is 90 to 175 degrees.
3. The apparatus of claim 2 , wherein the angle is 90 to 150 degrees.
4. The apparatus of claim 1 , wherein the bent portion has a radius of curvature of 450 to 1500 mm.
5. The apparatus of claim 4 , wherein the bent portion has a length of 100 to 1100 mm.
6. The apparatus of claim 1 , wherein the electrodes are arranged so that the tip ends of the electrodes form a substantially polygonal shape.
7. The apparatus of claim 1 , wherein the position displacement control unit further enables displacement of at least one of the relative position state of the mold and the electrodes, and the position state of the electrodes.
8. The apparatus of claim 7 , wherein the position displacement control unit performs at least one position displacement control among the horizontal direction movement, tilt, rotation or pivot of the mold, or the movement of the vertical relative position between the electrodes and the mold.
9. A method of manufacturing a vitreous silica crucible by use of the apparatus of claim 1 , comprising:
a silica powder supplying process for supplying silica powder inside the mold to form a silica powder layer, and
an arc fusing process for fusing the silica powder layer by arc discharge generated by the electrodes,
wherein, in the arc fusing process, the silica powder layer is fused by performing arc discharge toward the silica powder layer from respective tip ends of the electrodes, while displacing the position state of the mold.
10. The method of claim 9 , wherein, in the arc fusing process, the silica powder layer supplied in the mold supplied in the mold is fused while displacing at least one of the relative position state of the mold and the electrodes, and the position state of the electrodes.
11. The method of claim 10 , wherein, in the arc fusing process, at least one position displacement control among the horizontal direction movement, tilt, rotation or pivot of the mold, or the movement of the vertical relative position between the electrodes and the mold is performed.