Ferroelectric capacitor
A ferroelectric capacitor includes a ferroelectric film, a lower electrode in contact with one surface of the ferroelectric film, and an upper electrode in contact with the other surface of the ferroelectric film. At least one of the upper electrode and the lower electrode has a stacked electrode structure in which one or more oxide conductive layers and one or more metal layers are stacked alternately, and the stacked electrode structure includes at least one of two or more oxide conductive layers and two or more metal layers.
1. A ferroelectric capacitor comprising:
a ferroelectric film including a first surface and a second surface;
a lower electrode including a first surface and a second surface, the first surface of the lower electrode in contact with the first surface of the ferroelectric film;
an upper electrode in contact with the second surface of the ferroelectric film; and
a conductive barrier film in contact with the second surface of the lower electrode,
wherein at least one of the upper electrode or the lower electrode has a stacked electrode structure in which one or more oxide conductive layers and one or more metal layers are stacked alternately, and the stacked electrode structure includes at least one of two or more oxide conductive layers or two or more metal layers, and a porous iridium region including voids is formed in at least one of the oxide conductive layers.
2. The ferroelectric capacitor of claim 1 , wherein the stacked electrode structure includes at least two oxide conductive layers and at least one metal layer, and has a sandwich structure in which one metal layer is interposed between two adjacent oxide conductive layers.
3. The ferroelectric capacitor of claim 1 , wherein the stacked electrode structure includes at least one oxide conductive layer and at least two metal layers and has a sandwich structure in which one oxide conductive layer is interposed between two adjacent metal layers.
4. The ferroelectric capacitor of claim 1 , wherein one of the oxide conductive layers is in contact with the ferroelectric film.
5. The ferroelectric capacitor of claim 1 , wherein one of the metal layers is in contact with the ferroelectric film.
6. The ferroelectric capacitor of claim 1 , wherein the stacked electrode structure includes two or more oxide conductive layers, a first oxide conductive layer has a higher oxygen composition than a second oxide conductive layer, and the first oxide conductive layer is closer to the ferroelectric film than the second oxide conductive layer.
7. The ferroelectric capacitor of claim 1 , wherein each of the oxide conductive layers is thicker than each of the metal layers in contact with said each of the oxide conductive layers.
8. The ferroelectric capacitor of claim 1 , wherein the oxide conductive layers are made of oxide of metal forming the metal layers.
9. The ferroelectric capacitor of claim 1 , wherein the oxide conductive layers are made of iridium oxide and the metal layers are made of iridium.
10. The ferroelectric capacitor of claim 1 , wherein an area of the upper electrode is equal to or less than 1 μm 2 .
11. The ferroelectric capacitor of claim 1 , wherein an insulating hydrogen barrier film is continuously formed on the top surface of the upper electrode and side walls of the upper electrode, the ferroelectric film, the lower electrode, and the conductive barrier film.