Laser welded bonding pads for piezoelectric print heads
View Patent ↗An ink jet print head can be formed using a laser to melt a plating layer interposed between a piezoelectric actuator and a circuit layer bump. The plating layer can be formed on the circuit layer bump, the piezoelectric actuator, or both, and a laser beam output by the laser is used to melt the plating layer to provide a laser weld. In another embodiment, the circuit layer bump or the trace itself functions as the plating layer, which is melted using a laser to provide the laser weld.
1. A method for forming an ink jet print head, comprising:
physically contacting a plating layer on a conductive bump of a conductive circuit layer of a circuit with a piezoelectric actuator of a print head subassembly;
heating the conductive bump of the circuit layer and the piezoelectric actuator with a laser beam to melt the plating layer, wherein the plating layer is interposed between the conductive bump and the piezoelectric actuator; and
cooling the melted plating layer to solidify the melted plating layer, wherein the solidified plating layer provides a laser weld which physically connects the conductive circuit layer to the print head subassembly and electrically couples the conductive circuit layer to the print head subassembly.
2. The method of claim 1 , further comprising forming the plating layer on at least one of the conductive circuit layer bump and the piezoelectric actuator prior to heating the conductive circuit layer bump and the piezoelectric actuator.
3. The method of claim 2 , wherein the conductive circuit layer comprises a conductive trace electrically coupled to the conductive bump and a dielectric layer covering the conductive trace, and the method further comprises ablating the dielectric layer to expose the conductive trace during the heating of the circuit layer bump and the piezoelectric actuator using the laser beam to melt the plating layer.
4. The method of claim 3 , wherein the heating comprises the use of a green laser having a wavelength of about 532 nm.
5. The method of claim 4 , wherein the heating forms the laser weld to comprise a diameter of between about 15 μm and about 30 μm.
6. The method of claim 3 , wherein the heating comprises the use of a CO 2 laser having a wavelength of about 10 μm.
7. The method of claim 6 , wherein the heating forms the laser weld to comprise a diameter of between about 75 μm and about 150 μm.
8. The method of claim 1 further comprising, during the heating of the conductive bump and the piezoelectric actuator, melting the plating layer at a temperature of between about 180° C. and about 190° C.
9. The method of claim 1 further comprising, during the heating of the conductive bump and the piezoelectric actuator, melting the plating layer at a temperature of between about 600° C. and about 1600° C.