Noise shielding techniques for ultra low current measurements in biochemical applications
A device having an integrated noise shield is disclosed. The device includes a plurality of vertical shielding structures substantially surrounding a semiconductor device. The device further includes an opening above the semiconductor device substantially filled with a conductive fluid, wherein the plurality of vertical shielding structures and the conductive fluid shield the semiconductor device from ambient radiation. In some embodiments, the device further includes a conductive bottom shield below the semiconductor device shielding the semiconductor device from ambient radiation. In some embodiments, the opening is configured to allow a biological sample to be introduced into the semiconductor device. In some embodiments, the vertical shielding structures comprise a plurality of vias, wherein each of the plurality of vias connects more than one conductive layers together. In some embodiments, the device comprises a nanopore device, and wherein the nanopore device comprises a single cell of a nanopore array.
1. A device comprising:
a. nanopore device comprising a nanopore disposed in a membrane;
b. a sensor circuit in proximity to the nanopore disposed in the membrane; and
c. a cavity substantially filled with a conductive liquid;
wherein the conductive liquid shields the nanopore device from radiation.
2. The device of claim 1 , wherein the cavity substantially filled with the conductive liquid is above the sensor circuit.
3. The device of claim 1 , wherein the cavity is further coupled to an opening to allow a biological sample to be introduced into the cavity.
4. The device of claim 1 , wherein the conductive liquid comprises an electrolyte.
5. The device of claim 1 , wherein the nanopore device comprises a single cell of a nanopore array.
6. The device of claim 1 , further comprising a layer of oxide insulating the conductive liquid from a portion of the device.
7. A method for shielding a nanopore device from radiation, comprising:
providing a sensor circuit in proximity to a nanopore disposed in a membrane;
providing a cavity substantially filled with a conductive liquid; and
wherein the conductive liquid shields the nanopore device from radiation.
8. The method of claim 7 , wherein the cavity substantially filled with the conductive liquid is above the sensor circuit.
9. The method of claim 7 , further providing an opening coupled to the cavity, wherein the opening allows a biological sample to be introduced into the cavity.
10. The method of claim 7 , wherein the conductive liquid comprises an electrolyte.
11. The method of claim 7 , wherein the nanopore device comprises a single cell of a nanopore array.
12. The method of claim 7 , further providing a layer of oxide insulating the conductive liquid from a portion of the nanopore device.