High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using thin planar semiconductor absorbers
Back contact back junction solar cell and methods for manufacturing are provided. The back contact back junction solar cell comprises a substrate having a light capturing frontside surface with a passivation layer, a doped base region, and a doped backside emitter region with a polarity opposite the doped base region. A backside passivation layer and patterned reflective layer on the emitter form a light trapping backside mirror. An interdigitated metallization pattern is positioned on the backside of the solar cell and a permanent reinforcement provides support to the cell.
1. A method for the manufacture of a back contact back junction thin solar cell from a crystalline semiconductor layer, the method providing continuous structural support to said crystalline semiconductor layer, the method comprising:
forming a porous semiconductor layer on a template, wherein said template provides structural support and acts as a high temperature temporary carrier for back contact back junction solar cell backside processing steps, said backside processing steps comprising:
depositing a doped base crystalline semiconductor layer on said porous semiconductor layer;
forming a doped emitter layer on said doped base crystalline semiconductor layer;
depositing a backside passivation dielectric layer on said doped emitter layer;
forming backside base and emitter contact openings through said dielectric layer in an interdigitated finger pattern; and
doping exposed regions to form emitter regions and base regions;
separating said doped base crystalline semiconductor layer from said template along said porous semiconductor layer, wherein a permanent cell backside support is attached to said solar cell backside prior to release to provide support for cell processing steps comprising:
forming a light capturing frontside surface with a passivation layer; and
metalizing the cell backside to form backside base and emitter contacts in the pattern of interdigitated fingers and busbars.
2. The method of claim 1 , wherein the step of depositing a doped base crystalline semiconductor layer further comprises depositing a doped base epitaxial silicon layer with a thickness in the range of 15 to 50 microns.
3. The method of claim 1 , wherein the step of forming a doped emitter layer on said doped base crystalline semiconductor layer further comprises forming a doped emitter epitaxial layer.
4. The method of claim 1 , further comprising the step of etching a trench pattern in said emitter layer exposing said underlying doped base semiconductor layer for the formation of said doped base regions.
5. The method of claim 1 , wherein laser ablation is used to form backside base and emitter contact openings through said dielectric layer in an interdigitated finger pattern.
6. The method of claim 1 , wherein said interdigitated finger pattern is a distributed busbar array.
7. The method of claim 1 , wherein said permanent cell backside support is grid-shaped.