Method of manufacturing an opto-electric device
A method of manufacturing an opto-electric device is disclosed, comprising the steps of providing a substrate ( 10 ), overlying a first main side of the substrate with an electrically interconnected open shunting structure ( 20 ), embedding the electrically interconnected open shunting structure in a transparent layer ( 30 ), removing the substrate from the embedded electrically interconnected open shunting structure, depositing a functional layer structure ( 40 ) over a free surface ( 31 ) formed after removal of the substrate.
1. Method of manufacturing an opto-electric device having a support, comprising the steps of
providing a substrate ( 10 ),
overlaying a first main side of the substrate with an electrically interconnected open structure ( 20 ) formed of elongate elements,
embedding the electrically interconnected open structure in a transparent barrier layer ( 30 ), wherein the barrier layer is a stack subsequently comprising a first inorganic sublayer, an organic sublayer and a second inorganic sublayer, wherein the organic sublayer is a polymer layer having a thickness of at least 1 μm,
removing the substrate from the embedded electrically interconnected open structure, and
depositing a functional layer structure ( 40 ) over a free surface formed after removal of the substrate, wherein said organic sublayer serves as the support.
2. Method according to claim 1 , comprising the step of depositing at least one intermediate layer at the first side of the substrate before overlying that side of the substrate with the electrically interconnected open structure.
3. Method according to claim 2 , wherein the at least one intermediate layer is a transparent electrically conductive layer.
4. Method according to claim 1 , wherein the substrate is a metal substrate and the metal substrate is removed by etching.
5. Method according to claim 1 , wherein the substrate is provided with a soluble layer against which the structure is applied and wherein the substrate is removed by dissolving the soluble layer.
6. Method according to claim 1 , wherein the substrate is provided with a release layer against which the structure is applied and wherein the substrate is removed by peeling of the embedded open structure from the substrate with the release layer.
7. Method according to claim 4 , wherein the electrically interconnected open structure is formed of a further metal, the further metal being different from the metal used for the temporary substrate, and wherein the further metal is substantially insensitive for the etching agent used.
8. Method according to claim 1 , wherein the electrically interconnected open structure is provided by electro deposition.
9. Method according to claim 1 , wherein the electrically interconnected open structure is provided by
depositing a liquid substance at the substrate in an interconnected open structure,
curing the liquid substance, the interconnected open structure formed by the cured liquid substance being electrically conductive.
10. Method according to claim 1 , wherein the electrically interconnected open structure is provided by depositing a layer of a metal at the substrate and patterning the deposited layer.
11. Method according to claim 1 , wherein a polymer foil is laminated over the transparent layer.
12. Method according to claim 1 , wherein a polymer film is applied over the transparent layer by coating and curing.
13. Method according to claim 1 , wherein the thickness of said polymer layer is at least 5 μm.
14. Method according to claim 13 , wherein the thickness of said polymer layer is at most 200 μm.
15. Method according to claim 13 , wherein the thickness of said polymer layer is at most 100 μm.
16. Method according to claim 13 , wherein the thickness of said polymer layer is at most 50 μm.