Rotating type thin film deposition apparatus and thin film deposition method used by the same
View Patent ↗A rotating type thin film deposition apparatus having an improved structure that allows continuous deposition, and a thin film deposition method used by the rotating type thin film deposition apparatus are provided. The rotating type thin film deposition apparatus includes a deposition device; a circulation running unit that runs a deposition target on a circulation track via a deposition region of the deposition device; and a support unit that supports the deposition target and moves along the circulation track. Thin layers can be precisely and uniformly formed on the entire surface of a deposition target, and since deposition is performed while a plurality of deposition targets move along a caterpillar track, a working speed is faster compared to a method involving a general reciprocating motion, and the size of the thin film deposition apparatus can be reduced.
1. A thin film deposition apparatus comprising:
a deposition device;
a circulation running unit that moves a deposition target via a deposition region of the deposition device, the circulation running unit comprising:
a driving pulley that is rotated by a motor;
a driven pulley spaced apart from the driving pulley; and
a circulation belt coupling the driving pulley to the driven pulley, the circulation belt running over the driving pulley and the driven pulley; and
a support unit comprising:
a connection bar connected to the circulation belt; and
a support plate connected to the connection bar, the circulation belt moving the support plate along a direction, the support plate having a surface on which the deposition target is mounted, one side of the surface of the support plate being parallel to the moving direction of the support plate, a length of the one side of the surface of the support plate being the same as circumferential lengths of the driving pulley and the driven pulley to enable a smooth direction change of the circulation belt.
2. The thin film deposition apparatus of claim 1 , wherein the support unit further comprises:
a clamping mechanism that fixes the deposition target to the support plate.
3. The thin film deposition apparatus of claim 2 , wherein the clamping mechanism comprises:
a clamper that is rotatably installed on the support plate; and
an actuator that rotates and drives the clamper so that the clamper presses the deposition target towards the support plate to fix the deposition target to the support plate.
4. The thin film deposition apparatus of claim 1 , wherein the support unit including five support plates connected to the circulation belt.
5. The thin film deposition apparatus of claim 1 , further comprising a guide unit that prevents fluctuation of the deposition target while the support unit moves.
6. The thin film deposition apparatus of claim 5 , wherein the guide unit comprises:
a guide rail that is disposed along the circulation belt; and
a plurality of guide protrusions connected to the support plate, the guide protrusion moving along the guide rail.
7. The thin film deposition apparatus of claim 1 , wherein the surface of the support plate is laid horizontal with respect to ground while facing the deposition device.
8. The thin film deposition apparatus of claim 1 , wherein the surface of the support plate is laid vertical with respect to ground while facing the deposition device.
9. The thin film deposition apparatus of claim 1 further comprising another deposition device, the deposition device being disposed on one side of the circulation belt, said another deposition device being disposed on an opposite side of the one side of the circulation belt.
10. A thin film deposition method comprising:
loading a deposition target on a support plate of a support unit, the support plate moving along a circulation belt of a circulation running unit that moves the deposition target via a deposition region of a deposition device, the circulation running unit comprising:
a driving pulley that is rotated by a motor;
a driven pulley spaced apart from the driving pulley; and
the circulation belt coupling the driving pulley to the driven pulley, the circulation belt running over the driving pulley and the driven pulley;
moving the deposition target along the circulation belt so that deposition is performed on the deposition target while passing the deposition region of the deposition device; and
unloading the deposition target, after deposition is completed, from the support plate, the support unit comprising:
a connection bar connected to the circulation belt; and
the support plate connected to the connection bar, the circulation belt moving the support plate along a direction, the support plate having a surface on which the deposition target is mounted, one side of the surface of the support plate being parallel to the moving direction of the support plate, a length of the one side of the surface of the support plate being the same as circumferential lengths of the driving pulley and the driven pulley to enable a smooth direction change of the circulation belt.
11. The thin film deposition method of claim 10 , wherein the surface of the support plate is disposed in such a way that the deposition target is laid in a horizontal direction with respect to ground and runs along the circulation belt.
12. The thin film deposition method of claim 10 , wherein the surface of the support plate is disposed in such a way that the deposition target is laid in a vertical direction with respect to ground and runs along the circulation belt.
13. The thin film deposition method of claim 10 , wherein loading and unloading of the deposition target is performed at a position, at which the moving direction of the support plate is changed into an opposite direction along the circulation belt.
14. The thin film deposition method of claim 11 , wherein the deposition device is disposed on one side of the circulation belt, another deposition device being disposed on an opposite side of the one side of the circulation belt.