Semiconductor device and method for manufacturing the same
View Patent ↗A variation in electrical characteristics, such as a negative shift of the threshold voltage or an increase in S value, of a fin-type transistor including an oxide semiconductor material is prevented. An oxide semiconductor film is sandwiched between a plurality of gate electrodes with an insulating film provided between the oxide semiconductor film and each of the gate electrodes. Specifically, a first gate insulating film is provided to cover a first gate electrode, an oxide semiconductor film is provided to be in contact with the first gate insulating film and extend beyond the first gate electrode, a second gate insulating film is provided to cover at least the oxide semiconductor film, and a second gate electrode is provided to be in contact with part of the second gate insulating film and extend beyond the first gate electrode.
1. A semiconductor device comprising:
a first gate electrode over a surface of a substrate, the first gate electrode extending in a first direction parallel to the surface of the substrate;
a first gate insulating film covering a top surface and side surfaces of the first gate electrode;
an oxide semiconductor film covering the first gate electrode with the first gate insulating film interposed between the top surface of the first gate electrode and the oxide semiconductor film and between the side surfaces of the first gate electrode and the oxide semiconductor film;
a second gate insulating film covering the oxide semiconductor film; and
a second gate electrode over the second gate insulating film, the second gate electrode extending in a second direction parallel to the surface of the substrate,
wherein the second direction is substantially perpendicular to the first direction.
2. The semiconductor device according to claim 1 , further comprising an insulating film over the second gate insulating film and the second gate electrode.
3. The semiconductor device according to claim 1 , further comprising a capacitor, the capacitor comprising:
a lower electrode film comprising the same material as the first gate electrode; and
an upper electrode film comprising the same material as the second gate electrode.
4. The semiconductor device according to claim 3 ,
wherein the capacitor comprises an insulating film between the lower electrode film and the upper electrode film, and
wherein the insulating film comprises the same material as the first gate insulating film or the second gate insulating film.
5. The semiconductor device according to claim 3 , wherein a height of the lower electrode film is larger than a width of the lower electrode film.
6. A semiconductor device comprising:
a first gate electrode over a surface of a substrate, the first gate electrode extending in a first direction parallel to the surface of the substrate;
a first gate insulating film covering a top surface and side surfaces of the first gate electrode;
an oxide semiconductor film covering the first gate electrode with the first gate insulating film interposed between the top surface of the first gate electrode and the oxide semiconductor film and between the side surfaces of the first gate electrode and the oxide semiconductor film;
a source electrode and a drain electrode electrically connected to the oxide semiconductor film;
a second gate insulating film covering the oxide semiconductor film, the source electrode, and the drain electrode; and
a second gate electrode over the second gate insulating film, the second gate electrode extending in a second direction parallel to the surface of the substrate,
wherein the second direction is substantially perpendicular to the first direction.
7. The semiconductor device according to claim 6 , wherein the second gate electrode is provided between the source electrode and the drain electrode.
8. The semiconductor device according to claim 6 , further comprising an insulating film over the second gate insulating film and the second gate electrode.
9. The semiconductor device according to claim 6 , further comprising a capacitor, the capacitor comprising:
a lower electrode film comprising the same material as the first gate electrode; and
an upper electrode film comprising the same material as the second gate electrode.
10. The semiconductor device according to claim 9 ,
wherein the capacitor comprises an insulating film between the lower electrode film and the upper electrode film, and
wherein the insulating film comprises the same material as the first gate insulating film or the second gate insulating film.
11. The semiconductor device according to claim 9 , wherein a height of the lower electrode film is larger than a width of the lower electrode film.
12. A semiconductor device comprising:
a first gate electrode over a surface of a substrate, the first gate electrode extending in a first direction parallel to the surface of the substrate;
an oxide semiconductor film covering a top surface and side surfaces of the first gate electrode, the oxide semiconductor film extending in the first direction as a channel length direction;
a source electrode and a drain electrode electrically connected to the oxide semiconductor film; and
a second gate electrode over the oxide semiconductor film, the second gate electrode extending in a second direction parallel to the surface of the substrate,
wherein the second direction is substantially perpendicular to the first direction.
13. The semiconductor device according to claim 12 , further comprising an insulating film over the second gate electrode.
14. The semiconductor device according to claim 12 , further comprising a capacitor, the capacitor comprising:
a lower electrode film comprising the same material as the first gate electrode; and
an upper electrode film comprising the same material as the second gate electrode.
15. The semiconductor device according to claim 14 ,
wherein the capacitor comprises an insulating film between the lower electrode film and the upper electrode film.
16. The semiconductor device according to claim 14 , wherein a height of the lower electrode film is larger than a width of the lower electrode film.
17. The semiconductor device according to claim 12 , wherein the second direction is a channel width direction.