Display device
View Patent ↗The invention prevents disconnection of data lines that traverse two-layered gate lines via an insulating film. Data lines 20 override and thereby traverse gate lines 10 with an insulating film deposited therebetween. The gate lines 10 each have a two-layered structure including a lower AlCu layer 11 and an upper MoCr layer 12 . When the thickness ratio of the upper layer 12 to the lower layer 11 is in the range of 0.4 to 1.0, it is possible to prevent a decrease in the etch speed of the upper layer 12 near the side edges of the gate line 10 , which occurs due to galvanization. As a result, the upper layer 12 is prevented from having an overhang. The absence of overhangs on the gate lines 10 prevents the data lines 20 from being disconnected at the intersections of the gate lines 10 and the data lines 20.
1. A display device comprising:
gate lines extending in a first direction and arranged in a second direction;
data lines extending in the second direction and arranged in the first direction so as to intersect the gate lines and having a gate insulation layer therebetween; and
TFTs and pixel electrodes each formed within one of the regions surrounded by the gate lines and the data lines,
wherein the TFTs are bottom-gate TFTs,
wherein each of the gate lines comprises a lower layer formed of an AlCu alloy having a first thickness and an upper layer formed of a MoCr alloy having a second thickness,
wherein a relationship of the second thickness of the upper layer of the MoCr alloy of the gate line to the first thickness of the lower layer of the AlCu alloy of the gate line has a thickness ratio which avoids formation of an overhang of the upper layer of the MoCr alloy over the lower layer of the AlCu alloy of the gate line due to galvanization, and which overhang enables formation of a disconnection of the data line in a region of an intersection of the data line and the gate line, the thickness ratio of the second thickness of the upper layer of the MoCr alloy to the first thickness of the lower layer of the AlCu alloy being within a range of 0.4 to 1.0.
2. The display device of claim 1 , wherein the thickness ratio of the upper layer of the MoCr alloy to the lower layer of the AlCu alloy is within the range of 0.6 to 1.0.
3. The display device of claim 1 , wherein the upper layer of the MoCr alloy has the second thickness of a minimum thickness of 40 nm.
4. The display device of claim 1 , wherein the MoCr alloy of the upper layer is at least 90% Mo, and the AlCu alloy of the lower layer is at least 90% Al.