Inspection apparatus and inspection method
An inspection apparatus inspects a photovoltaic cell panel in which the photo device is formed. The inspection apparatus includes: an irradiation part that irradiates the photovoltaic cell panel with pulsed light (pump light) emitted from a femtosecond laser; a detecting part that detects an electromagnetic wave pulse, which is generated from the photovoltaic cell panel according to the irradiation of the pump light; and a continuous light irradiation part that irradiates a portion, which is irradiated with the pump light in the photovoltaic cell panel, with continuous light.
1. An inspection apparatus that inspects a photo device, the inspection apparatus comprising:
an irradiation part that irradiates said photo device with pulsed light emitted from a femtosecond laser;
a detecting part that detects an electromagnetic wave, which is generated from said photo device according to the irradiation of said pulsed light;
a continuous light irradiation part that irradiates a portion, which is irradiated with said pulsed light in said photo device, with continuous light; and
an irradiation condition changing part that changes an irradiation diameter of said continuous light.
2. The inspection apparatus according to claim 1 , wherein said irradiation condition changing part changes an intensity of said continuous light.
3. The inspection apparatus according to claim 1 , wherein said continuous light includes pieces of light having a plurality of wavelengths different from each other.
4. The inspection apparatus according to claim 3 , wherein said photo device is a photovoltaic cell, and said continuous light includes artificial sunlight.
5. The inspection apparatus according to claim 1 , wherein said continuous light is a laser beam having a single wavelength.
6. The inspection apparatus according to claim 1 , further comprising a reverse bias voltage applying part that applies a voltage to put said photo device into a reverse bias state.
7. The inspection apparatus according to claim 1 , wherein said continuous light irradiation part is constructed by a semiconductor laser, an LED or a combination thereof.
8. An inspection method for inspecting a photo device, comprising the steps of:
irradiating said photo device with pulsed light emitted from a femtosecond laser;
detecting an electromagnetic wave, which is generated from said photo device by the irradiation of said pulsed light;
irradiating a portion, which is irradiated with said pulsed light in said photo device, with continuous light; and
changing an irradiation diameter of said continuous light.
9. The inspection method according to claim 8 , further comprising the step of changing an intensity of said continuous light.
10. The inspection method according to claim 8 , wherein said continuous light includes pieces of light having a plurality of wavelengths different from each other.
11. The inspection method according to claim 10 , wherein said photo device is a photovoltaic cell, and said continuous light includes artificial sunlight.
12. The inspection method according to claim 8 , wherein said continuous light is a laser beam having a single wavelength.
13. The inspection method according to claim 8 , wherein the step of irradiating the portion includes applying a reverse bias voltage to put said photo device into a reverse bias state.