Resonator, frequency filter, duplexer, electronic device, and method of manufacturing resonator
A resonator according to the present invention includes a supporting substrate, a piezoelectric layer, a pair of excitation electrodes, and a bonding layer. The piezoelectric layer is made of a piezoelectric material. The pair of excitation electrodes is formed on the upper surface of the piezoelectric layer so as to excite bulk acoustic waves. The bonding layer has a cavity formed therein so as to face the excitation electrode pair through the piezoelectric layer, and the bonding layer bonds the supporting substrate to the lower surface of the piezoelectric layer.
1. A resonator, comprising:
a supporting substrate;
a piezoelectric layer made of a piezoelectric material;
a pair of excitation electrodes that is formed on an upper surface of the piezoelectric layer, the pair of excitation electrodes being provided to excite bulk acoustic waves in the piezoelectric layer; and
a bonding layer that has a cavity formed therein so as to face the pair of excitation electrodes through the piezoelectric layer, the bonding layer being provided to bond the supporting substrate to a lower surface of the piezoelectric layer,
wherein said cavity starts from a top of the bonding layer and does not penetrate through a bottom of the bonding layer.
2. The resonator according to claim 1 , wherein the bulk acoustic waves are Lamb waves.
3. The resonator according to claim 1 , wherein the bonding layer is made of an insulating material.
4. The resonator according to claim 1 , wherein the pair of excitation electrodes is an IDT.
5. A frequency filter, comprising:
a supporting substrate;
a piezoelectric layer made of a piezoelectric material;
a plurality of pairs of excitation electrodes that are formed on an upper surface of the piezoelectric layer, the plurality of pairs of excitation electrodes being provided to excite bulk acoustic waves in the piezoelectric layer; and
a bonding layer that has a cavity formed therein so as to face each of the pairs of excitation electrodes through the piezoelectric layer, the bonding layer being provided to bond the supporting substrate to a lower surface of the piezoelectric layer,
wherein said cavity starts from a top of the bonding layer and does not penetrate through a bottom of the bonding layer.
6. A duplexer, comprising:
a transmission filter that comprises: a supporting substrate; a piezoelectric layer made of a piezoelectric material; a plurality of pairs of excitation electrodes that are formed on an upper surface of the piezoelectric layer, the plurality of pairs of excitation electrodes being provided to excite bulk acoustic waves in the piezoelectric layer and at least some of the excitation electrodes being connected to each other; and a bonding layer that has a cavity formed therein so as to face each of the pairs of excitation electrodes through the piezoelectric layer, the bonding layer being provided to bond the supporting substrate to a lower surface of the piezoelectric layer, the transmission filter being connected to an antenna and to a transmission port, wherein said cavity starts from a top of the bonding layer and does not penetrate through a bottom of the bonding layer; and
a reception filter that comprises: a supporting substrate; a piezoelectric layer made of a piezoelectric material; a plurality of pairs of excitation electrodes that are formed on an upper surface of the piezoelectric layer, the plurality of pairs of excitation electrodes being provided to excite bulk acoustic waves in the piezoelectric layer and at least some of the excitation electrodes being connected to each other; and a bonding layer that has a cavity formed therein so as to face each of the pairs of excitation electrodes through the piezoelectric layer, the bonding layer being provided to bond the supporting substrate to a lower surface of the piezoelectric layer, the reception filter being connected to the antenna and to a reception port, wherein said cavity starts from a top of the bonding layer and does not penetrate through a bottom of the bonding layer.
7. An electronic device, comprising:
an antenna;
a transmission filter that comprises: a supporting substrate; a piezoelectric layer made of a piezoelectric material; a plurality of pairs of excitation electrodes that are formed on an upper surface of the piezoelectric layer, the plurality of pairs of excitation electrodes being provided to excite bulk acoustic waves in the piezoelectric layer and at least some of the excitation electrodes being connected to each other; and a bonding layer that has a cavity formed therein so as to face each of the pairs of excitation electrodes through the piezoelectric layer, the bonding layer being provided to bond the supporting substrate to a lower surface of the piezoelectric layer, the transmission filter being connected to the antenna and to a transmission port, wherein said cavity starts from a top of the bonding layer and does not penetrate through a bottom of the bonding layer; and
a reception filter that comprises: a supporting substrate; a piezoelectric layer made of a piezoelectric material; a plurality of pairs of excitation electrodes that are formed on an upper surface of the piezoelectric layer, the plurality of pairs of excitation electrodes being provided to excite bulk acoustic waves in the piezoelectric layer and at least some of the excitation electrodes being connected to each other; and a bonding layer that has a cavity formed therein so as to face each of the pairs of excitation electrodes through the piezoelectric layer, the bonding layer being provided to bond the supporting substrate to a lower surface of the piezoelectric layer, the reception filter being connected to the antenna and to a reception port, wherein said cavity starts from a top of the bonding layer and does not penetrate through a bottom of the bonding layer.