MEMS anchors
The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.
1. A MEMS device comprising:
a substrate including a surface;
a shutter suspended over the surface, the shutter including a first side and second side, the second side being substantially opposite to the first side along an axis of movement of the shutter;
a first actuator coupled to the first side of the shutter via a first compliant beam; and
a second actuator coupled to the second side of the shutter via a second compliant beam,
wherein the first actuator is the only actuator coupled to the first side of the shutter.
2. The MEMS device of claim 1 , wherein the first compliant beam includes an attachment point to the shutter that is substantially along the axis of movement of the shutter.
3. The MEMS device of claim 2 , wherein the second compliant beam includes an attachment point to the shutter that is substantially along the axis of movement of the shutter.
4. The MEMS device of claim 1 , wherein the shutter is in a first position along the axis of movement in response to the first actuator being in a relaxed state and the second actuator being in an actuated state.
5. The MEMS device of claim 1 , wherein the shutter is in a second position along the axis of movement in response to the first actuator being in an actuated state and the second actuator being in a relaxed state.
6. The MEMS device of claim 1 , wherein the shutter includes one or more shutter apertures.
7. The MEMS device of claim 1 , wherein the first compliant beam includes a first electrode.
8. The MEMS device of claim 7 , wherein the second compliant beam includes a second electrode.
9. The MEMS device of claim 1 , wherein the surface includes an aperture for allowing the passage of light over which the shutter is at least partially suspended.
10. A MEMS device comprising:
a substrate including a surface;
a shutter suspended over the surface, the shutter including a first side and second side, the second side being substantially opposite to the first side along an axis of movement of the shutter;
a first means for moving the shutter coupled to the first side of the shutter via a first compliant beam; and
a second means for moving the shutter coupled to the second side of the shutter via a second compliant beam,
wherein the first means is the only means coupled to the first side of the shutter.
11. The MEMS device of claim 10 , wherein the first compliant beam includes an attachment point to the shutter that is substantially along the axis of movement of the shutter.
12. The MEMS device of claim 11 , wherein the second compliant beam includes an attachment point to the shutter that is substantially along the axis of movement of the shutter.
13. The MEMS device of claim 10 , wherein the shutter is in a first position along the axis of movement in response to the first means for moving the shutter being in a relaxed state and the second means for moving the shutter being in an actuated state.
14. The MEMS device of claim 10 , wherein the shutter is in a second position along the axis of movement in response to the first means for moving the shutter being in an actuated state and the second means for moving the shutter being in a relaxed state.
15. The MEMS device of claim 10 , wherein the shutter includes one or more shutter apertures.
16. The MEMS device of claim 10 , wherein the first compliant beam includes a first electrode.
17. The MEMS device of claim 16 , wherein the second compliant beam includes a second electrode.
18. The MEMS device of claim 10 , wherein the surface includes an aperture for allowing the passage of light over which the shutter is at least partially suspended.
19. The MEMS device of claim 1 , wherein the second actuator is the only actuator coupled to the second side of the shutter.
20. The MEMS device of claim 10 , wherein the second means is the only means coupled to the second side of the shutter.