Formation of gate sidewall structure
View Patent ↗A semiconductor device having a gate stack on a substrate is disclosed. The gate stack may include a mask layer disposed over a first gate conductor layer. The first gate conductor layer may be laterally etched beneath the mask layer to create an overhanging portion of the mask layer. A sidewall dielectric can be formed on the sidewall of the first gate conductor layer beneath the overhanging portion of the mask layer. A sidewall structure layer can be formed adjacent to the sidewall dielectric and beneath the overhanging portion of the mask layer. The mask layer can be removed. The first gate conductor layer can be used to form a memory gate and the sidewall structure layer can be used to form a select gate.
1. A method of making a semiconductor device, comprising:
forming a gate stack on a substrate, wherein the gate stack includes a mask layer disposed over an additional mask layer that is disposed between the mask layer and a first gate conductor layer;
laterally etching the first gate conductor layer so that an overhanging portion of the mask layer extends beyond the additional mask layer and the first gate conductor layer in a direction parallel to a surface of the substrate;
forming a sidewall structure layer such that the sidewall structure layer is disposed beneath the overhanging portion of the mask layer; and
removing the mask layer.
2. The method of claim 1 , wherein a dielectric is formed between the gate stack and the substrate.
3. The method of claim 2 , further comprising etching a portion of the dielectric disposed beneath the overhanging portion of the mask layer.
4. The method of claim 2 , wherein the dielectric comprises a nitride layer and a dielectric layer.
5. The method of claim 1 , wherein forming the sidewall dielectric comprises forming the sidewall dielectric such that it extends to a sidewall portion of the additional mask layer that is beneath the overhanging portion of the mask layer.
6. The method of claim 5 , wherein the sidewall structure layer is formed such that it is in contact with portions of the sidewall dielectric that are adjacent to the first gate conductor layer and the additional mask layer.
7. The method of claim 1 , wherein the sidewall structure layer comprises a dielectric.
8. The method of claim 1 , wherein the sidewall structure layer is used to form a select gate.
9. The method of claim 1 , further comprising etching the sidewall structure layer.