Semiconductor circuit board, semiconductor device using the same, and method for manufacturing semiconductor circuit board
The present invention provides a semiconductor circuit board in which a conductor portion is provided on an insulating substrate, wherein a surface roughness of a semiconductor element-mounting section of the conductor portion is 0.3 μm or lower in arithmetic average roughness Ra, 2.5 μm or lower in ten-point average roughness Rzjis, 2.0 μm or smaller in maximum height Rz, and 0.5 μm or lower in arithmetic average waviness Wa. Further, assuming that a thickness of the insulating substrate is t1 and a thickness of the conductor portion is t2, the thickness of t1 and t2 satisfy a relation: 0.1≦t2/t1≦50. Due to above structure, even if an amount of heat generation of the semiconductor element is increased, there can be provided a semiconductor circuit board and a semiconductor device having excellent TCT characteristics.
1. A semiconductor circuit board in which a conductor portion is provided on an insulating substrate, wherein a surface roughness of a semiconductor element-mounting section of the conductor portion is 0.3 μm or lower in arithmetic average roughness Ra, 2.5 μm or lower in ten-point average roughness Rzjis, 2.0 μm or smaller in maximum height Rz, and 0.5 μm or lower in arithmetic average waviness Wa.
2. The semiconductor circuit board according to claim 1 , wherein assuming that a thickness of the insulating substrate is t1 and a thickness of the conductor portion is t2, the thickness of t1 and t2 satisfy a relation: 0.1≦t2/t1≦50.
3. The semiconductor circuit board according to claim 1 , wherein a cross-sectional angle of a lateral-side edge of the conductor portion is 45° or smaller.
4. The semiconductor circuit board according to claim 1 , wherein the conductor portion is made of a metal plate, whereas the insulating substrate is made of a ceramic substrate, and a region (width) of a bonding layer, for joining the metal plate and the ceramic substrate, protruding from the metal plate is 0.2 mm or smaller.
5. The semiconductor circuit board according to claim 1 , wherein the insulating substrate is composed of one of an alumina substrate, an aluminum nitride substrate, a silicon nitride substrate, and an insulating resin substrate.
6. The semiconductor circuit board according to claim 1 , wherein the conductor portion is composed of one of copper, copper alloy, aluminum, and aluminum alloy.
7. A semiconductor device in which a semiconductor element is mounted on a conductor portion of a semiconductor circuit board according to claim 1 .
8. The semiconductor device according to claim 7 , wherein the semiconductor element is composed of one or more than one element selected from a group consisting of an Si element, a GaN element, and an SiC element.
9. The semiconductor device according to claim 7 , wherein the semiconductor element is bonded to the conductor portion with a bonding material interposed therebetween.
10. The semiconductor device according to claim 7 , wherein the semiconductor element is directly bonded to the conductor portion without a bonding material interposed therebetween.
11. A method for manufacturing a semiconductor circuit board, comprising:
a conductor portion formation step of forming a conductor portion on an insulating substrate;
a surface treatment step of setting a surface roughness of a semiconductor element-mounting section of the conductor portion to 0.3 μm or lower in arithmetic average roughness Ra, 2.5 μm or lower in ten-point average roughness Rzjis, 2.0 μm or smaller in maximum height Rz, and 0.5 μm or lower in arithmetic average waviness Wa; and
a bonding step of bonding a semiconductor element to the semiconductor element-mounting section of the conductor portion.
12. The method for manufacturing a semiconductor circuit board according to claim 11 , wherein the surface treatment step is a polishing step.
13. The method for manufacturing a semiconductor circuit board according to claim 12 , wherein the polishing step is an etching step.
14. The method for manufacturing a semiconductor circuit board according to claim 12 , wherein the polishing step is a pressing process.