Assist feature for a photolithographic process
A photomask having a partial-thickness assist feature and a technique for manufacturing the photomask are disclosed. In an exemplary embodiment, the photomask includes a mask substrate, a reflective structure disposed on the mask substrate, and an absorptive layer formed on the reflective structure. A printing feature region and an assist feature region are defined on the mask. The absorptive layer has a first thickness in the printing feature region and a second thickness in the assist feature region that is different from the first thickness. In some such embodiments, the second thickness is configured such that radiation reflected by the assist feature region does not exceed an exposure threshold of a photoresist of a target.
1. A lithographic mask comprising:
a mask substrate;
a reflective structure disposed on the mask substrate; and
an absorptive layer formed on the reflective structure,
wherein the mask includes a printing feature region and an assist feature region defined thereupon,
wherein the absorptive layer has a first thickness in the printing feature region and a second thickness in the assist feature region, and
wherein the first thickness and the second thickness are different.
2. The lithographic mask of claim 1 , wherein the printing feature region is substantially free of the absorptive layer.
3. The lithographic mask of claim 1 , wherein the first thickness is greater than the second thickness.
4. The lithographic mask of claim 1 , wherein the second thickness is configured such that radiation reflected by the assist feature region does not exceed an exposure threshold of a photoresist of a target.
5. The lithographic mask of claim 1 , wherein the assist feature region is adjacent to the printing feature region.
6. The lithographic mask of claim 1 , wherein the absorptive layer includes an upper absorptive layer and a lower absorptive layer.
7. The lithographic mask of claim 6 , wherein the assist feature region includes a portion of the upper absorptive layer and a portion of the lower absorptive layer.
8. The lithographic mask of claim 6 , wherein the assist feature region is substantially free of the upper absorptive layer.
9. A lithographic mask comprising:
a mask substrate;
a reflective structure disposed on the mask substrate; and
an absorptive layer formed on the reflective structure,
wherein the mask includes a printing feature region with a first feature within a resolution of a radiation to be applied to the lithographic mask,
wherein the mask includes a sub-resolution assist feature (SRAF) region with a second feature less than the resolution of the radiation to be applied to the lithographic mask,
wherein the absorptive layer has a first thickness in the printing feature region and a second thickness in the SRAF region, and
wherein the first thickness and the second thickness are different.
10. The lithographic mask of claim 9 , wherein the printing feature region is substantially free of the absorptive layer.
11. The lithographic mask of claim 9 , wherein the first thickness is greater than the second thickness.
12. The lithographic mask of claim 9 , wherein the SRAF region is adjacent to the printing feature region.
13. The lithographic mask of claim 9 , wherein the absorptive layer includes an upper absorptive layer and a lower absorptive layer.
14. The lithographic mask of claim 13 , wherein the SRAF region includes a portion of the upper absorptive layer and a portion of the lower absorptive layer.
15. The lithographic mask of claim 13 , wherein the SRAF region is substantially free of the upper absorptive layer.
16. A lithographic mask comprising:
a mask substrate;
a reflective structure disposed on the mask substrate; and
an absorptive layer formed on the reflective structure,
wherein the mask includes a printing feature region, an assist feature region, and a third region that is neither a printing feature region nor an SRAF region,
wherein the absorptive layer has a first thickness in the printing feature region, a second thickness in the assist feature region, and a third thickness in the third region, and
wherein the first, second, and third thicknesses are different.
17. The lithographic mask of claim 16 , wherein the printing feature region is substantially free of the absorptive layer.
18. The lithographic mask of claim 16 , wherein the first thickness is greater than the second thickness.
19. The lithographic mask of claim 16 , wherein the second thickness is configured such that radiation reflected by the assist feature region does not exceed an exposure threshold of a photoresist of a target.
20. The lithographic mask of claim 16 , wherein the absorptive layer includes an upper absorptive layer and a lower absorptive layer, and wherein the assist feature region includes a portion of the upper absorptive layer and a portion of the lower absorptive layer.