Semiconductor device and method for forming the same
View Patent ↗A semiconductor device in which a gettering layer is formed in a semiconductor substrate, and a method for forming the same are disclosed, resulting in increased reliability of the semiconductor substrate including the gettering layer. The semiconductor device includes a semiconductor substrate; a gettering layer formed of a first-type impurity and a second-type impurity in the semiconductor substrate so as to perform gettering of metal ion; and a deep-well region formed over the gettering layer in the semiconductor substrate.
1. A method for forming a semiconductor device, comprising:
preparing for a semiconductor substrate, a back side of which includes a passivation layer and a denuded zone layer;
forming a gettering layer including a first-type impurity and a second-type impurity in the denuded zone layer of the semiconductor substrate; and
forming a deep-well region over the gettering layer contained in the denuded zone layer.
2. The method according to claim 1 , wherein the first-type impurity includes P-type impurity and the second-type impurity includes N-type impurity.
3. The method according to claim 1 , wherein the first-type impurity includes boron (B) ion and the second-type impurity includes phosphorous (P) ion.
4. The method according to claim 1 , wherein the deep-well region is formed by implantation of the second-type impurity.
5. The method according to claim 1 , further comprising:
after the formation of the gettering layer, forming a film by fabricating the back side of the semiconductor substrate.
6. The method according to claim 5 , wherein the forming the film includes:
grinding the entirety of the passivation layer and some parts of the denuded zone layer in a manner that the entire passivation layer and the some parts of the denuded zone layer are removed.
7. The method according to claim 6 , further comprising:
after completion of the formation of the film, forming the deep-well region in the denuded zone layer.
8. A method for forming a semiconductor device, comprising:
forming a gettering layer formed of a first-type impurity and a second-type impurity over a back side of a semiconductor substrate; and
forming a deep-well region over the gettering layer contained in the semiconductor substrate.
9. The method according to claim 8 , wherein the first-type impurity includes P-type impurity and the second-type impurity includes N-type impurity.
10. The method according to claim 8 , wherein the first-type impurity includes boron (B) ion and the second-type impurity includes phosphorous (P) ion.
11. The method according to claim 8 , wherein the deep-well region is formed by implantation of the second-type impurity.
12. The method according to claim 8 , wherein the forming the gettering layer includes:
forming a monocrystalline silicon layer over a back side of the semiconductor substrate;
implanting the first-type impurity into the monocrystalline silicon layer; and
implanting the second-type impurity into the monocrystalline silicon layer in which the first-type impurity is implanted.
13. The method according to claim 8 , wherein the forming the gettering layer includes:
depositing or attaching a monocrystalline silicon layer in which the first-type impurity is implanted, over a back side of the semiconductor substrate; and
implanting the second-type impurity into the monocrystalline silicon layer in which the first-type impurity is implanted.
14. The method according to claim 8 , wherein the forming the gettering layer includes:
implanting the first-type impurity into a monocrystalline silicon layer;
implanting the second-type impurity into the monocrystalline silicon layer; and
depositing or attaching the monocrystalline silicon layer in which the first-type impurity and the second-type impurity are implanted, over the back side of the semiconductor substrate.