IP Library Granted Patent US 9,412,911
Granted Patent B2
US 9,412,911 · App. 14/325,131 · Granted Aug 9, 2016

Optical tuning of light emitting semiconductor junctions

Inventor: Petar Atanackovic (Eight Mile Plains, AU)
Assignee: The Silanna Group Pty Ltd
H01L33/44H01L33/0095H01L33/20H01L33/32H01L27/153H01L33/30
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Quick Facts
Patent No.
US 9,412,911
App. No.
14/325,131
Granted
Aug 9, 2016
Kind
B2
Abstract

Light emitting semiconductor junctions are disclosed. An exemplary light emitting junction has a first electrical contact coupled to a first side of the junction. The exemplary junction also has a second electrical contact coupled to a second side of the junction. The exemplary junction also has a region of set straining material that exerts a strain on the junction and alters both: (i) an optical polarization, and (ii) an emission wavelength of the junction. The region of set straining material is not on a current path between said first electrical contact and said second electrical contact. The region of set straining material covers a third side and a fourth side of the light emitting junction along a cross section of the light emitting junction. The light emitting semiconductor junction device comprises a three-five alloy.

Claims (90)

1. An ultraviolet light emitting diode, comprising:

an ultraviolet light emitting junction;

a first electrical contact coupled to a first side of the junction;

a second electrical contact coupled to a second side of the junction; and

a region of set straining material that exerts a strain on the junction and alters both:

(i) an optical polarization, and (ii) an emission wavelength of the junction;

wherein the region of set straining material lies outside a current path that includes the first electrical contact and the second electrical contact; and

the light emitting semiconductor junction device comprises a three-five alloy.

2. The ultraviolet light emitting diode of claim 1 , wherein:

the junction comprises an epitaxy material;

the region of set straining material comprises a non-epitaxy material; and

the optical polarization of the junction, as altered by the strain on the junction, is linear.

3. The ultraviolet light emitting diode of claim 1 , wherein:

the three-five alloy comprises a ternary group-three nitride alloy; and

said ternary group-three nitride alloy comprises gallium.

4. The ultraviolet light emitting diode of claim 1 , wherein:

a structure of the junction is selected from a group consisting of: a lateral p-i-n structure; a superlattice structure; and a multiple quantum well structure.

5. The ultraviolet light emitting diode of claim 1 , wherein:

the region of set straining material comprises a plurality of external stressors.

6. The ultraviolet light emitting diode of claim 5 , wherein:

the plurality of external stressors all contribute a uniaxial component to the strain on the junction.

7. The ultraviolet light emitting diode of claim 5 , wherein:

at least one of the plurality of external stressors contributes a biaxial component to the strain on the junction.

8. The ultraviolet light emitting diode of claim 5 , wherein:

at least one of the plurality of external stressors contributes a triaxial component to the strain on the junction.

9. The ultraviolet light emitting diode of claim 1 , further comprising:

a trench that penetrates a layer of material used to form the junction;

wherein the region of set straining material includes a bottom portion of the trench.

10. The ultraviolet light emitting diode of claim 9 , wherein:

the region of set straining material comprises an oxidized semiconductor material.

11. The ultraviolet light emitting diode of claim 1 , wherein said region of set straining material:

fully encompasses the junction in two directions along a cross section of the junction; and

is in direct contact with an active layer of the junction.

12. The ultraviolet light emitting diode of claim 11 , further comprising:

an n-type layer of the junction, a p-type layer of the junction, and an i-type layer of the junction;

wherein the n-type layer, the p-type layer, and the region of set straining material fully encompass the i-type layer; and

wherein the region of set straining material forms an annular cylinder.

13. The ultraviolet light emitting diode of claim 12 , wherein:

the region of set straining material surrounds a mesa;

the mesa comprises the junction; and

the region of set straining material leaves a top side of the mesa partially exposed to provide the first electrical contact for the junction.

14. The ultraviolet light emitting diode of claim 1 , further comprising:

a substrate layer supporting the junction; and

a buffer layer having a first surface in contact with a top side of the substrate;

wherein the region of set straining material is also in contact with the first surface of the buffer layer.

15. The ultraviolet light emitting diode of claim 14 , wherein:

the region of set straining material is in an excavated portion of the substrate.

16. A light emitting semiconductor junction device, comprising:

a light emitting junction;

a first electrical contact coupled to a first side of the junction;

a second electrical contact coupled to a second side of the junction; and

a region of set straining material that exerts a strain on the junction and alters both:

(i) an optical polarization, and (ii) emission wavelength of the junction;

wherein: the first electrical contact and the second electrical contact provide a current path to the light emitting junction independent of the region of set straining material;

the region of set straining material covers a third side and a fourth side of the light emitting junction along a cross section of the light emitting junction; and

the light emitting semiconductor junction device comprises a three-five alloy.

17. The light emitting semiconductor junction device of claim 16 , wherein:

the light emitting semiconductor junction device is a deep ultraviolet diode;

the light emitting junction comprises a ternary group-three nitride alloy; and

the ternary group-three nitride alloy comprises gallium.

18. The light emitting semiconductor junction device of claim 17 , wherein:

the light emitting junction comprises aluminum.

19. The light emitting semiconductor junction device of claim 16 , wherein:

the light emitting semiconductor junction device is a vertical p-i-n deep ultraviolet diode; and

the region of set straining material forms an annular cylinder.

20. The light emitting semiconductor junction device of claim 16 , wherein:

said light emitting semiconductor junction device is a lateral p-i-n ultraviolet diode; and

the region of set straining material covers a fifth side of the light emitting junction along the cross section.

21. A light emitting semiconductor junction device, comprising:

a light emitting junction;

a first electrical contact coupled to a first side of the junction;

a second electrical contact coupled to a second side of the junction; and

a region of set straining material that exerts a strain on the junction and alters both: (i) an optical polarization, and (ii) emission wavelength of the junction;

wherein: the region of set straining material is not on a current path between said first electrical contact and said second electrical contact;

said region of set straining material covers a third side and a fourth side of the light emitting junction along a cross section of the light emitting junction;

the light emitting semiconductor junction device comprises a three-five alloy.

22. The light emitting semiconductor junction device of claim 21 , further comprising:

a trench that penetrates a layer of material used to form the junction; and

an oxidized polysilicon material formed in the trench;

wherein the region of set straining material comprises the oxidized polysilicon material.

23. The light emitting semiconductor junction device of claim 21 , further comprising:

a trench that penetrates a layer of material used to form the junction;

wherein the region of set straining material comprises a metal-oxide of the layer of material.

24. The light emitting semiconductor junction device of claim 21 , wherein:

the light emitting semiconductor junction device is an ultraviolet diode;

the light emitting semiconductor junction device comprises a ternary group-three nitride alloy; and

the ternary group-three nitride alloy comprises gallium and aluminum.

25. The light emitting semiconductor junction device of claim 24 , further comprising:

a trench that penetrates a layer of the ternary group-three nitride alloy;

wherein the region of set straining material comprises a metal-oxide of the ternary group-three nitride alloy.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 10, 2018
From: THE SILANNA GROUP PTY LTD
To: SILANNA UV TECHNOLOGIES PTE LTD
Reel/Frame 045878/0016 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 10, 2014
From: ATANACKOVIC, PETAR
To: SILANNA SEMICONDUCTOR PTY LTD.
Reel/Frame 033289/0873 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 10, 2014
From: SILANNA SEMICONDUCTOR PTY LTD.
To: THE SILANNA GROUP PTY LIMITED
Reel/Frame 033290/0143 →
Continuity (2)
Provisional Application 61844228 · Jul 9, 2013
Related Publication 20150014723A1 · Jan 15, 2015