Film deposition device
View Patent ↗A film deposition device is disclosed. The device includes a driver, a sputtering target assembly, and at least one rotatable magnetoelectric device located at the back of the sputtering target assembly. The rotatable magnetoelectric device includes a transmission having a conveyor belt, and at least one pair of gears which cooperate with the conveyor belt and are disposed at an inner side of the conveyor belt, where an axial direction of the gears is substantially parallel to a surface of the sputtering target assembly. The rotatable magnetoelectric device also includes a first set of magnets, where the first set of magnets are disposed outside of the conveyor belt. In addition, the driver is configured to cause the gears to rotate.
1. A film deposition device, comprising:
a driver;
a sputtering target assembly; and
at least one rotatable magnetoelectric device located at the back of the sputtering target assembly, wherein the rotatable magnetoelectric device comprises:
a transmission, comprising:
a conveyor belt, and
at least one pair of gears which cooperate with the conveyor belt and are disposed at an inner side of the conveyor belt, wherein an axial direction of the gears is substantially parallel to a surface of the sputtering target assembly, and
a first set of magnets, wherein the first set of magnets are disposed outside of the conveyor belt,
wherein the driver is configured to cause the gears to rotate;
the film deposition device further comprising at least one reciprocating transmission, which is located at the back of the sputtering target assembly and is disposed in parallel with the rotatable magnetoelectric device,
wherein a second set of magnets, which includes a plurality of second magnets, is disposed on the reciprocating transmission, and the reciprocating transmission is configured to cause the second set of magnets to move reciprocally in parallel to the axial direction, and a speed of reciprocating motion of each of the second magnets is adjusted to control thickness of a deposited film;
wherein the first set of magnets comprises a plurality of first magnets, and a plurality of adjusting screws; the plurality of first magnets are evenly spaced and disposed on the conveyor belt each of the plurality of adjusting screws corresponds to a respective one of the plurality of first magnets, has a head in contact with the inner side of the conveyor belt, and is configured to adjust the distance between the respective one of the plurality of first magnets and the sputtering target assembly, and
wherein the plurality of second magnets are evenly spaced and configured to move reciprocally in parallel to the axial direction, each of the plurality of second magnets is driven by a respective one of reciprocating driving motors of the driver.
2. The film deposition device of claim 1 ,
wherein the plurality of second magnets are evenly spaced and configured to move reciprocally in parallel to the axial direction.
3. The film deposition device of claim 1 , wherein the sputtering target assembly comprises a sputtering target and a backboard.
4. The film deposition device of claim 3 , wherein a length of each of the first magnets along the axial direction is greater than a length of the backboard along the axial direction.
5. The film deposition device of claim 4 , wherein the length of each of the first magnets along the axial direction is greater than the length of the backboard along the axial direction by 1 mm to 1000 mm.
6. The film deposition device of claim 2 , wherein the sputtering target assembly comprises a sputtering target and a backboard.
7. The film deposition device of claim 6 , wherein a length of each of the second magnets along the axial direction is greater than a length of the backboard along the axial direction.
8. The film deposition device of claim 7 , wherein the length of each of the second magnets along the axial direction is greater than the length of the backboard along the axial direction by 1 mm to 1000 mm.
9. The film deposition device of claim 1 , wherein each of the first magnets has a length within a range from 10 mm to 1000 mm, a width within a range from 5 mm to 1000 mm and a height within a range from 5 mm to 1000 mm.
10. The film deposition device of claim 2 , wherein the plurality of magnets of the second set of magnets each have a length within a range from 10 mm to 1000 mm, a width within a range from 5 mm to 1000 mm and a height within a range from 5 mm to 1000 mm.
11. The film deposition device of claim 3 , wherein the sputtering target is welded on the backboard.
12. The film deposition device of claim 1 , wherein the driver is configured to cause the transmission to rotate clockwise or counterclockwise.
13. The film deposition device of claim 6 , wherein the sputtering target is welded on the backboard.