Semiconductor structure, semiconductor device, and method for producing semiconductor structure
The present invention provides a semiconductor structure which includes at least a p-type silicon carbide single crystal layer having an α-type crystal structure, containing aluminum at impurity concentration of 1×10 19 cm −3 or higher, and having thickness of 50 μm or greater. Further provided is a method for producing the semiconductor structure of the present invention which method includes at least epitaxial growth step of introducing silicon carbide source and aluminum source and epitaxially growing p-type silicon carbide single crystal layer over a base layer made of silicon carbide single crystal having α-type crystal structure, wherein the epitaxial growth step is performed at temperature conditions of from 1,500° C. to 1,700° C., and pressure conditions of from 5×10 3 Pa to 25×10 3 Pa.
1. A semiconductor structure, comprising:
a p-type silicon carbide single crystal layer that has an α-type crystal structure, contains aluminum at an impurity concentration of 1×10 19 cm −3 or higher, and has a thickness of 50 μm to 300 μm
wherein the p-type silicon carbide single crystal layer does not contain an impurity except the aluminum; and
wherein the p-type silicon carbide single crystal layer has a resistivity of 100 mΩcm or lower.
2. The semiconductor structure according to claim 1 , wherein the impurity concentration of aluminum contained in the p-type silicon carbide single crystal layer is 1×10 20 cm −3 or higher.
3. The semiconductor structure according to claim 2 , further comprising:
an n-type silicon carbide single crystal layer that forms a junction with the p-type silicon carbide single crystal layer, has an α-type crystal structure, contains nitrogen at an impurity concentration of 1×10 15 cm −3 or lower, and has a thickness of 50 μm or greater.
4. The semiconductor structure according claim 3 , wherein the semiconductor structure has a total thickness of 250 μm or greater.
5. A semiconductor structure, comprising:
a p-type silicon carbide single crystal layer that is formed directly or indirectly over an off substrate inclined from a (0001) plane by 8° or less but greater than 0° and made of a silicon carbide single crystal having an α-type crystal structure, has the α-type crystal structure, and contains aluminum at an impurity concentration of 1×10 19 cm −3 or higher; and
an n-type silicon carbide single crystal layer that has the α-type crystal structure, contains nitrogen at an impurity concentration of 1×10 15 cm −3 or lower, has a thickness of 50 μm or greater, and is disposed to form a junction with the p-type silicon carbide single crystal layer, wherein the p-type silicon carbide single crystal layer does not contain an impurity except the aluminum; and wherein the p-type silicon carbide single crystal layer has a resistivity of 100 mΩcm or lower.
6. The semiconductor structure according to claim 5 , wherein the p-type silicon carbide single crystal layer has a thickness of 0.5 μm or greater.
7. The semiconductor structure according to claim 5 , wherein the semiconductor structure has a total thickness of 250 μm or greater.
8. The semiconductor structure according to claim 7 , further comprising:
a first n-type silicon carbide single crystal layer that has an α-type crystal structure, contains nitrogen at an impurity concentration of from 1×10 17 cm −3 to 1×10 19 cm −3 , and has a thickness of 10 μm or less; and
a first p-type silicon carbide single crystal layer that has the α-type crystal structure, contains aluminum at an impurity concentration of from 1×10 17 cm −3 to 1×10 18 cm −3 , and has a thickness of from 0.5 μm to 5 μm,
wherein the first n-type silicon carbide single crystal layer, the n-type silicon carbide single crystal layer as a second n-type silicon carbide single crystal layer, the first p-type silicon carbide single crystal layer, and the p-type silicon carbide single crystal layer as a second p-type silicon carbide single crystal layer are formed in this order over the off substrate inclined from the (0001) plane by 8° or less but greater than 0° and made of the silicon carbide single crystal having the α-type crystal structure.
9. The semiconductor structure according to claim 8 , further comprising:
a third n-type silicon carbide single crystal layer that has an α-type crystal structure, contains nitrogen at an impurity concentration of from 1×10 15 cm −3 to 1×10 17 cm −3 , and has a thickness of 1 μm or less,
wherein the third n-type silicon carbide single crystal layer is disposed between the second n-type silicon carbide single crystal layer and the first p-type silicon carbide single crystal layer.
10. The semiconductor structure according to claim 9 , wherein the semiconductor structure has a TTV value equal to or less than a TTV value of the off substrate, where the TTV values represent thickness variation.
11. The semiconductor structure according to claim 10 , further comprising:
a MOS structure formed over a [000-1]C plane of the semiconductor structure, resulting in a semiconductor device which is an IGBT semiconductor device.