IP Library › Granted Patent US 9,512,985

Granted Patent B2

US 9,512,985 · App. 13/774,025 · Granted Dec 6, 2016

Systems for providing illumination in optical metrology

Inventors: Gregory R. Brady (San Jose, CA); Andrei V. Shchegrov (Campbell, CA); Lawrence D. Rotter (Pleasanton, CA); Derrick Shaughnessy (San Jose, CA); Anatoly Shchemelinin (Pleasanton, CA); Ilya Bezel (Sunnyvale, CA); Muzammil A. Arain (Milpitas, CA); Anatoly A. Vasiliev (Sunnyvale, CA); James Andrew Allen (Elk Grove, CA); Oleg Shulepov (San Jose, CA); Andrew V. Hill (Sunnyvale, CA); Ohad Bachar (Timrat, IL); Moshe Markowitz (Haifa, IL); Yaron Ish-Shalom (Kyryat Tivon, IL); Ilan Sela (Haifa, IL); Amnon Manassen (Haifa, IL); Alexander Svizher (Haifa, IL); Maxim Khokhlov (Haifa, IL); Avi Abramov (Haifa, IL); Oleg Tsibulevsky (Migdal Haemeq, IL); Daniel Kandel (Aseret, IL); Mark Ghinovker (Yoqneam Ilit, IL)

Assignee: KLA-Tencor Corporation

F21V13/08 F21V13/00 F21V13/12 G02B6/29332 G02B6/29362 G02B6/353 G02B6/3508

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Quick Facts

Patent No.: US 9,512,985
App. No.: 13/774,025
Granted: Dec 6, 2016
Kind: B2

External Links

USPTO Patent Center↗ Full Patent PDF↗

Abstract

The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Claims (99)

1. A system for providing illumination to a measurement head, comprising:

a plurality of illumination sources including a first illumination source, a second illumination source, a third illumination source, a fourth illumination source, a fifth illumination source, and a sixth illumination source;

a first fold mirror configured to reflect illumination from the first illumination source along a guidance path;

a second fold mirror configured to reflect illumination from the second illumination source along the guidance path;

a first dichroic combiner configured to transmit illumination from the first illumination source along the guidance path, the first dichroic combiner further configured to reflect illumination from the third illumination source along the guidance path;

a second dichroic combiner configured to transmit illumination from the second illumination source along the guidance path, the second dichroic combiner further configured to reflect illumination from the fourth illumination source along the guidance path;

a third dichroic combiner configured to transmit illumination from the first illumination source and illumination from the third illumination source along the guidance path, the third dichroic combiner further configured to reflect illumination from the fifth illumination source along the guidance path;

a fourth dichroic combiner configured to transmit illumination from the sixth illumination source along the guidance path; the fourth dichroic combiner further configured to reflect illumination from the second illumination source and illumination from the fourth illumination source along the guidance path; and

a fifth dichroic combiner configured to transmit illumination from the second illumination source, illumination from the fourth illumination source, and illumination from the sixth illumination source along an illumination path to a measurement head, the fifth dichroic combiner further configured to reflect illumination from the first illumination source, illumination from the third illumination source, and illumination from the fifth illumination source along the illumination path to the measurement head.

2. The system of claim 1 , wherein the system further includes:

a plurality of shutters, each shutter configured to receive illumination from an illumination source of the plurality of illumination sources, the plurality of shutters configured to allow illumination at a selected wavelength to be delivered along the illumination path.

3. The system of claim 1 , wherein each illumination source of the plurality of illumination sources is configured to provide illumination at a selected wavelength.

4. The system of claim 1 , wherein each illumination source of the plurality of illumination sources is configured to provide illumination at a selected intensity.

5. The system of claim 4 , wherein the selected intensity of each illumination source is controlled by pulse width modulation.

6. The system of claim 4 , wherein the selected intensity of each illumination source is controlled utilizing an acousto-optic filter.

7. The system of claim 1 , wherein the illumination path includes one or more optical elements configured to separate illumination into orthogonal polarization components.

8. The system of claim 1 , wherein the system further includes:

a wavelength monitor configured to receive a portion of illumination from the illumination path.

9. The system of claim 1 , wherein the illumination path includes one or more single-mode optical fibers configured to deliver illumination to the measurement head.

10. The system of claim 1 , wherein the illumination path includes one or more multi-mode optical fibers configured to deliver illumination to the measurement head.

11. The system of claim 10 , wherein the illumination path further includes:

a coupling lens configured to focus illumination;

a fold mirror configured to receive focused illumination from the coupling lens; and

an actuator coupled to the fold mirror, the actuator configured for actuating the fold mirror to scan focused illumination across at least one core of the one or more multi-mode fibers.

12. The system of claim 10 , wherein the illumination path further includes:

a coupling lens configured to focus illumination delivered to the one or more multi-mode fibers; and

an actuator coupled to a tip of the one or more multi-mode fibers, the actuator configured for actuating the tip of the one or more multi-mode fibers so that focused illumination is scanned across at least one core of the one or more multi-mode fibers.

13. The system of claim 10 , wherein the illumination path further includes:

an actuator configured to vibrate the one or more multi-mode fibers.

14. The system of claim 1 , wherein at least one of the plurality of illumination sources is a supercontinuum laser.

15. A system for providing illumination to a measurement head, comprising:

a first dichroic combiner configured to transmit illumination from the first illumination source along a guidance path, the first dichroic combiner further configured to reflect illumination from the second illumination source along the guidance path;

a second dichroic combiner configured to transmit illumination from the third illumination source along the guidance path, the second dichroic combiner further configured to reflect illumination from the first illumination source and illumination from the second illumination source along the guidance path;

a third dichroic combiner configured to transmit illumination from the fourth illumination source along the guidance path, the third dichroic combiner further configured to reflect illumination from the fifth illumination source along the guidance path;

a fourth dichroic combiner configured to transmit illumination from the fourth illumination source and illumination from the fifth illumination source along an illumination path to a measurement head, the fourth dichroic combiner further configured to reflect illumination from the first illumination source, illumination from the second illumination source, and illumination from the third illumination source along the illumination path to the measurement head; and

a beam splitter configured to direct illumination from the sixth illumination source along the illumination path to the measurement head.

16. The system of claim 15 , wherein the system further includes:

17. The system of claim 15 , wherein each illumination source of the plurality of illumination sources is configured to provide illumination at a selected wavelength.

18. The system of claim 15 , wherein each illumination source of the plurality of illumination sources is configured to provide illumination at a selected intensity.

19. The system of claim 18 , wherein the selected intensity of each illumination source is controlled by pulse width modulation.

20. The system of claim 18 , wherein the selected intensity of each illumination source is controlled utilizing an acousto-optic filter.

21. The system of claim 15 , wherein the illumination path includes one or more optical elements configured to separate illumination into orthogonal polarization components.

22. The system of claim 15 , wherein the system further includes:

a wavelength monitor configured to receive a portion of illumination from the illumination path.

23. The system of claim 15 , wherein the illumination path includes one or more single-mode optical fibers configured to deliver illumination to the measurement head.

24. The system of claim 15 , wherein the illumination path includes one or more multi-mode optical fibers configured to deliver illumination to the measurement head.

25. The system of claim 24 , wherein the illumination path further includes:

a coupling lens configured to focus illumination;

a fold mirror configured to receive focused illumination from the coupling lens; and

an actuator coupled to the fold mirror, the actuator configured for actuating the fold mirror to scan focused illumination across at least one core of the one or more multi-mode fibers.

26. The system of claim 24 , wherein the illumination path further includes:

a coupling lens configured to focus illumination delivered to the one or more multi-mode fibers; and

27. The system of claim 24 , wherein the illumination path further includes:

an actuator configured to vibrate the one or more multi-mode fibers.

28. The system of claim 15 , wherein at least one of the plurality of illumination sources is a supercontinuum laser.

29. A system for providing illumination to a measurement head, comprising:

a plurality of illumination sources configured to provide illumination at a plurality of wavelengths along a plurality of optical fibers, each optical fiber configured to receive illumination at a different wavelength;

a coupling lens configured to receive illumination at a selected wavelength from a selected optical fiber of the plurality of optical fibers, the coupling lens further configured to direct illumination at the selected wavelength along a delivery optical fiber;

a ferrule configured to hold the plurality of optical fibers;

an actuator mechanically coupled to at least one of the ferrule, the coupling lens, and the delivery optical fiber, the actuator configured to align the selected optical fiber with at least one of the coupling lens and the delivery optical fiber; and

a collimation lens configured receive illumination at the selected wavelength from the delivery optical fiber, the collimation lens further configured to direct illumination at the selected wavelength along an illumination path to a measurement head.

30. The system of claim 29 , wherein each illumination source of the plurality of illumination sources is configured to provide illumination at a selected intensity.

31. The system of claim 30 , wherein the selected intensity of each illumination source is controlled by pulse width modulation.

32. The system of claim 30 , wherein the selected intensity of each illumination source is controlled utilizing an acousto-optic filter.

33. The system of claim 29 , wherein the illumination path includes one or more optical elements configured to separate illumination into orthogonal polarization components.

34. The system of claim 29 , wherein the system further includes:

a wavelength monitor configured to receive a portion of illumination from the illumination path.

35. The system of claim 29 , wherein the illumination path includes one or more single-mode optical fibers configured to deliver illumination to the measurement head.

36. The system of claim 29 , wherein the illumination path includes one or more multi-mode optical fibers configured to deliver illumination to the measurement head.

37. The system of claim 36 , wherein the illumination path further includes:

a coupling lens configured to focus illumination;

a fold mirror configured to receive focused illumination from the coupling lens; and

an actuator coupled to the fold mirror, the actuator configured for actuating the fold mirror to scan focused illumination across at least one core of the one or more multi-mode fibers.

38. The system of claim 36 , wherein the illumination path further includes:

a coupling lens configured to focus illumination delivered to the one or more multi-mode fibers; and

39. The system of claim 36 , wherein the illumination path further includes:

an actuator configured to vibrate the one or more multi-mode fibers.

40. The system of claim 29 , wherein at least one of the plurality of illumination sources is a supercontinuum laser.

41. A system for providing illumination to a measurement head, comprising:

a waveguide structure configured to direct illumination from the plurality of optical fibers along an illumination path to a measurement head, wherein the waveguide structure includes a plurality of optical fiber splitters for combining light from the plurality of illumination sources, wherein a particular optical fiber splitter combines illumination from a first illumination source and a second illumination source; and

a plurality of shutters disposed between the plurality of illumination sources and the waveguide structure, the plurality of shutters configured to allow illumination at a selected wavelength to be delivered along the illumination path.

42. The system of claim 41 , wherein the one or more optical splitters include a plurality of cascaded single-mode optical fiber splitters.

43. The system of claim 42 , wherein the illumination path includes a bifurcated optical fiber configured to direct a portion of illumination to each polarization channel of the measurement head.

44. The system of claim 41 , wherein the waveguide structure includes a planar lightwave circuit.

45. The system of claim 44 , wherein the planar lightwave circuit includes a plurality of intensity modulators configured to control intensity of illumination received from each illumination source.

46. The system of claim 44 , wherein the system further includes single-mode fibers configured to deliver illumination to polarization channels of the measurement head, wherein the planar lightwave circuit includes a splitter configured to direct a portion of illumination along each of the single-mode optical fibers to each of the polarization channels of the measurement head.

47. The system of claim 38 , wherein at least one of the plurality of illumination sources is a supercontinuum laser.

48. A system for providing illumination to a measurement head, comprising:

one or more illumination sources including at least one of a broadband illumination source and a plurality of laser sources;

a wavelength selection mechanism including at least one of a tunable filter, a plurality of shutters, a ferrule, and a plurality of waveguide modulators, the wavelength selection mechanism configured receive illumination from the one or more illumination sources, the wavelength selection mechanism further configured to direct at least a portion of received illumination having a selected wavelength along an illumination path;

an intensity controller including at least one of a pulse width modulator, an acousto-optic filter, and a waveguide intensity modulator, the intensity controller configured to control intensity of the portion of illumination delivered along the illumination path; and

a coherence controller including at least one of an optical fiber actuator, a fold mirror actuator, and an incoherent illumination source, the coherence controller configured to decrease speckle in the portion of illumination delivered along the illumination path.

49. The system of claim 48 , wherein the one or more illumination sources include a broadband source and a plurality of laser sources.

50. The system of claim 48 , wherein at least one of the plurality of laser sources is a supercontinuum laser.

Assignments (1)

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 16, 2013

From: BRADY, GREGORY; SHCHEGROV, ANDREI V.; ROTTER, LAWRENCE D.; SHAUGHNESSY, DERRICK; SHCHEMELININ, ANATOLY; BEZEL, ILYA; ARAIN, MUZAMMIL A.; VASILIEV, ANATOLY A.; ALLEN, JAMES ANDREW; SHULEPOV, OLEG; HILL, ANDREW V.; BACHAR, OHAD; MARKOWITZ, MOSHE; ISH-SHALOM, YARON; SELA, ILAN; MANASSEN, AMNON; SVIZHER, ALEXANDER; KHOKHLOV, MAXIM; ABRAMOV, AVI; TSIBULEVSKY, OLEG; KANDEL, DANIEL; GHINOVKER, MARK

To: KLA-TENCOR CORPORATION

Reel/Frame 030429/0753 →

Continuity (1)

Related Publication 20140240951A1 · Aug 28, 2014