IP Library Granted Patent US 9,537,031
Granted Patent B2
US 9,537,031 · App. 13/929,827 · Granted Jan 3, 2017

Nozzle assembly and method for fabricating a solar cell

Inventor: Shih-Wei Chen (Kaohsiung, TW)
Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
H01L31/0463H01L21/6715Y02E10/50
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Quick Facts
Patent No.
US 9,537,031
App. No.
13/929,827
Granted
Jan 3, 2017
Kind
B2
Abstract

A method for fabricating a solar cell using a nozzle assembly that includes a base portion, a scriber coupled to the base portion, and a nozzle coupled to the base portion such that the nozzle is positioned a predefined distance from a tip of the scriber is provided. The method generally comprises positioning a substructure that includes a buffer layer and an absorber layer proximate to the base portion. A P2 line is scribed through the buffer and absorber layers of the substructure using the scriber tip. A nanoparticle solution is sprayed, using the nozzle, onto at least one portion of the buffer layer at a predefined pressure when the P2 line is being scribed through the buffer and absorber layers such that a transparent conductive oxide (TCO) layer is inhibited from forming over the portion of the buffer layer that is being sprayed with the nanoparticle solution.

Claims (26)

1. A method for fabricating a solar cell, said method comprising:

positioning a substructure that includes a buffer layer and an absorber layer proximate to a tip of a scriber;

scribing a P2 scribe line through the buffer and absorber layers of the substructure using the scriber tip; and

depositing a nanoparticle solution onto at least one portion of the buffer layer proximate the P2 scribe line, when the P2 scribe line is being scribed through the buffer and absorber layers, such that a transparent conductive oxide (TCO) layer is inhibited from forming over the at least one portion of the buffer layer.

2. The method of claim 1 , wherein depositing the nanoparticle solution comprises spraying a silicon dioxide nanoparticle solution onto the at least one portion of the buffer layer.

3. The method of claim 1 , further comprising extending a nozzle outwardly from a base portion of an apparatus containing the scriber, such that a centerline of the nozzle is at a non-perpendicular angle with respect to a surface of the base portion.

4. The method of claim 1 , further comprising extending a nozzle outwardly from a base portion of an apparatus containing the scriber, such that a centerline of the nozzle is perpendicular with respect to a surface of the base portion.

5. The method of claim 1 , further comprising moving a nozzle with respect to a base portion of an apparatus containing the scriber, such that a predefined distance between the nozzle and the scriber tip changes.

6. The method of claim 1 , wherein depositing the nanoparticle solution comprises spraying a nanoparticle solution onto a predefined area on a surface of the buffer layer.

7. The method of claim 6 , further comprising changing a pressure of a nozzle that is used to perform the spraying, such that the predefined area on the surface that is being sprayed with the nanoparticle solution varies.

8. A method for fabricating a solar cell, said method comprising:

positioning a substructure that includes a buffer layer and an absorber layer proximate to a tip of a scriber;

scribing a P2 scribe line through the buffer and absorber layers of the substructure using the scriber tip;

depositing a nanoparticle solution onto at least one portion of the buffer layer when the P2 scribe line is being scribed through the buffer and absorber layers, the nanoparticle solution capable of preventing deposition of a transparent conductive oxide (TCO) layer on the at least one portion of the buffer layer; and

forming the TCO layer over the buffer layer except over the at least one portion of the buffer layer, so as to form a P3 scribe line through the TCO layer.

9. The method of claim 8 , wherein depositing the nanoparticle solution comprises spraying a silicon dioxide nanoparticle solution onto the at least one portion of the buffer layer.

10. The method of claim 8 , further comprising extending a nozzle outwardly from a base portion of an apparatus containing the scriber, such that a centerline of the nozzle is at a non-perpendicular angle with respect to a surface of the base portion.

11. The method of claim 8 , further comprising extending a nozzle outwardly from a base portion of an apparatus containing the scriber, such that a centerline of the nozzle is perpendicular with respect to a surface of the base portion.

12. The method of claim 8 , further comprising moving a nozzle with respect to a base portion of an apparatus containing the scriber, such that a predefined distance between the nozzle and the scriber tip changes.

13. The method of claim 8 , wherein depositing the nanoparticle solution comprises spraying a nanoparticle solution onto a predefined area on a surface of the buffer layer.

14. The method of claim 13 , further comprising changing a pressure of a nozzle that is used to perform the spraying, such that the predefined area on the surface that is being sprayed with the nanoparticle solution varies.

15. A method for fabricating a solar cell, said method comprising:

positioning a substructure that includes a buffer layer and an absorber layer proximate to a tip of a scriber;

scribing a P2 scribe line through the buffer and absorber layers of the substructure using the tip of the scriber; and

depositing a nanoparticle solution onto at least one portion of the buffer layer proximate the P2 scribe line, when the P2 scribe line is being scribed through the buffer and absorber layers, the nanoparticle solution capable of preventing deposition of a transparent conductive oxide (TCO) layer;

forming the TCO layer over the buffer layer except over the at least one portion of the buffer layer, so as to form a P3 scribe line through the TCO layer.

Assignments (2)
MERGER Recorded Jun 16, 2016
From: TSMC SOLAR LTD.
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 039050/0299 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 28, 2013
From: CHEN, SHIH-WEI
To: TSMC SOLAR LTD.
Reel/Frame 030704/0733 →
Continuity (1)
Related Publication 20150004734A1 · Jan 1, 2015