IP Library Granted Patent US 9,548,543
Granted Patent B2
US 9,548,543 · App. 14/591,908 · Granted Jan 17, 2017

Method for fabricating and packaging an M×N phased-array antenna

Inventors: Harish Subbaraman (Austin, TX); Xiaochuan Xu (Austin, TX); Yihong Chen (Austin, TX); Ray T. Chen (Austin, TX)
Assignee: Omega Optics, Inc.
H01Q21/0087H01Q1/38H01Q21/061H05K3/125H05K2201/09918H05K2203/013
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Quick Facts
Patent No.
US 9,548,543
App. No.
14/591,908
Granted
Jan 17, 2017
Kind
B2
Abstract

A method for fabricating an M×N, P-bit phased-array antenna on a flexible substrate is disclosed. The method comprising ink jet printing and hardening alignment marks, antenna elements, transmission lines, switches, an RF coupler, and multilayer interconnections onto the flexible substrate. The substrate of the M×N, P-bit phased-array antenna may comprise an integrated control circuit of printed electronic components such as, photovoltaic cells, batteries, resistors, capacitors, etc. Other embodiments are described and claimed.

Claims (45)

1. A method for manufacturing an M×N, P-bit phased array antenna comprising:

ink jet printing and hardening a first layer on a substrate, wherein the first layer comprises:

one or more alignment marks;

an RF coupler;

M×N antenna elements; and

transmission lines, wherein the transmission lines comprise 2×M×N×P channel gap regions;

ink-jet printing and hardening a first semiconductor layer within each of the 2 ×M×N×P channel gap regions and on top of the portion of the transmission lines adjacent to each of the 2×M×N×P channel gap regions;

ink jet printing and hardening a first dielectric layer over the first semiconductor layer and on top of the portion of the transmission lines and of the portion of the substrate adjacent to the first semiconductor layer;

ink jet printing and hardening a second conductive layer on top of the portion of the first dielectric layer positioned over the 2×M×N×P channel gap regions and on top of the portion of the substrate adjacent to the first dielectric layer, wherein the second conductive layer comprises 2×M×N×P contact pads adjacent to each of the 2×M×N×P channel gap regions with conducting lines from the first dielectric layer positioned over the 2×M×N×P channel gap regions to the 2×M×N×P contact pads;

ink jet printing and hardening a second dielectric layer on top of substantially the second conductive layer and on top of the portion of the transmission lines and of the portion of the substrate adjacent to the second conductive layer, wherein the second dielectric layer comprises openings positioned over the 2×M×N×P contact pads; and

ink jet printing and hardening a third conductive layer within each of the openings positioned over the 2×M×N×P contact pads and on top of a portion of the second dielectric layer.

2. The method of claim 1 , further comprising ink jet printing and hardening a ground plane on the substrate on the side opposite that of the first layer.

3. The method of claim 1 , wherein the ink jet printing and hardening of the first layer comprises:

determining a position for the one or more alignment marks on the substrate;

determining positions for the RF coupler, the M×N antenna elements, and the transmission lines relative to the position of the one or more alignment marks;

depositing a material on the substrate at the position for the one or more alignment marks, at the position for the RF coupler, at the position for the M×N antenna elements, and at the position for the transmission lines, wherein the material comprises at least one of: silver, copper, aluminum, gold, conductive polymer, graphene, and carbon nanotubes; and

curing the material, wherein curing the material comprises: irradiating the material with UV, heating the material, exposing the material to high power, short light pulses, and/or air drying the material.

4. The method of claim 3 , wherein the length of the transmission lines from the RF coupler to 2×M×N of the 2×M×N×P channel gap regions are substantially equal.

5. The method of claim 1 , wherein the ink jet printing and hardening of the first semiconductor layer comprises:

detecting the one or more alignment marks on the substrate;

depositing a liquid semiconductor material within each of the 2×M×N×P channel gap regions and on top of the portion of the transmission lines adjacent to each of the 2×M×N×P channel gap regions, wherein the liquid semiconductor material comprises at least one of: carbon nanotubes, graphene, organic semiconductors, and silicon nanoparticles; and

curing the liquid semiconductor material, wherein curing the liquid semiconductor material comprises: irradiating the liquid semiconductor material with UV, heating the liquid semiconductor material, exposing the liquid semiconductor material to high power, short light pulses, and/or air drying the liquid semiconductor material.

6. The method of claim 1 , wherein the ink jet printing and hardening of the first dielectric layer comprises:

detecting the position of the one or more alignment marks on the substrate;

depositing a liquid dielectric material over the first semiconductor layer and on top of the portion of the transmission lines and of the portion of the substrate adjacent to the first semiconductor layer, wherein the liquid dielectric material comprises a conductive polymer and/or an ion gel; and

curing the liquid dielectric material, wherein curing the liquid dielectric material comprises: irradiating the liquid dielectric material with UV, heating the liquid dielectric material, exposing the liquid dielectric material to high power, short light pulses, and/or air drying the liquid dielectric material.

7. The method of claim 1 , wherein the ink jet printing and hardening of the second conductive layer comprises:

detecting the position of the one or more alignment marks on the substrate;

depositing a second liquid conductive material on top of the portion of the first dielectric layer positioned over the 2×M×N×P channel gap regions and on top of the portion of the substrate adjacent to the first dielectric layer, wherein the second liquid conductive material comprises at least one of: silver, copper, aluminum, gold, conductive polymer, graphene, and carbon nanotubes; and

curing the second liquid conductive material, wherein curing the second liquid conductive material comprises: irradiating the second liquid conductive material with UV, heating the second liquid conductive material, exposing the second liquid conductive material to high power, short light pulses, and/or air drying the second liquid conductive material.

8. The method of claim 1 , wherein the ink jet printing and hardening of the second dielectric layer comprises:

detecting the position of the one or more alignment marks on the substrate;

depositing a second liquid dielectric material on top of substantially the second conductive layer and on top of the portion of the transmission lines and of the portion of the substrate adjacent to the second conductive layer, wherein the second liquid dielectric material comprises a conductive polymer and/or an ion gel; and

curing the second liquid dielectric material, wherein curing the second liquid dielectric material comprises: irradiating the second liquid dielectric material with UV, heating the second liquid dielectric material, exposing the second liquid dielectric material to high power, short light pulses, and/or air drying the second liquid dielectric material.

9. The method of claim 1 , wherein the ink jet printing and hardening a third conductive layer comprises:

detecting the position of the one or more alignment marks on the substrate;

depositing a third liquid conductive material within each of the openings positioned over the 2×M×N×P contact pads and on top of a portion of the second dielectric layer, wherein the third liquid conductive material comprises at least one of: silver, copper, aluminum, gold, conductive polymer, graphene, and carbon nanotubes; and

curing the third liquid conductive material, wherein curing the third liquid conductive material comprises: irradiating the third liquid conductive material with UV, heating the third liquid dielectric material, exposing the third liquid dielectric material to high power, short light pulses, and/or air drying the third liquid dielectric material.

10. The method of claim 1 , wherein the substrate is at least one of: a metal film, a plastic, a paper, a cardboard, and a cloth.

11. The method of claim 1 , wherein the substrate comprises an integrated control circuit.

12. The method of claim 11 , wherein the integrated control circuit comprises photovoltaic cells, batteries, resistors, and/or capacitors.

13. The method of claim 1 , wherein M ranges from 1 to 100.

14. The method of claim 1 , wherein N ranges from 1 to 100.

15. The method of claim 1 , wherein P ranges from 2 to 8.

16. The method of claim 1 , wherein the channel gap of each of the 2×M×N×P channel gap regions ranges from about 1 micron to about 100 microns.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 23, 2015
From: SUBBARAMAN, HARISH; CHEN, RAY T.; XU, XIAOCHUAN; CHEN, YIHONG
To: OMEGA OPTICS, INC.
Reel/Frame 035004/0295 →
Continuity (1)
Related Publication 20160197411A1 · Jul 7, 2016