Siloxanes, doped siloxanes, methods for their synthesis, compositions containing the same, and films formed therefrom
View Patent ↗In one aspect, the present invention provides undoped and doped siloxanes, germoxanes, and silagermoxanes that are substantially free from carbon and other undesired contaminants. In a second aspect, the present invention provides methods for making such undoped and doped siloxanes, germoxanes, and silagermoxanes. In still another aspect, the present invention provides compositions comprising undoped and/or doped siloxanes, germoxanes, and silagermoxanes and a solvent, and methods for forming undoped and doped dielectric films from such compositions. Undoped and/or doped siloxane compositions as described advantageously provide undoped and/or doped dielectric precursor inks that may be employed in forming substantially carbon-free undoped and/or doped dielectric films.
1. A siloxane, germoxane, or silagermoxane compound, comprising at least 7 units of the formula
—(OA[O d H] 2 )— or —(OA[O d H] 3 ), where each instance of A is independently Si or Ge, and each instance of d is independently 0 or 1, and one or more units of the formula O c DR 1 p , where each instance of D is independently Sb, As, P, B or Al, each instance of p is independently an integer from 0 to 2, and each instance of R 1 is independently alkyl, aryl, aralkyl, H, OH or AR 2 , where R 2 is H, OH or —(OA) y (O c H) 2y+1 , y is an integer from 1 to 4, and each instance of c independently 0 or 1.
2. The compound of claim 1 , wherein A is Si.
3. The compound of claim 2 , having the formula -(c-(OA) q [O d H] 2q-x )—, where q is an integer from 7 to 12, and x is an integer from 0 to q.
4. The compound of claim 3 , wherein d=0.
5. The compound of claim 2 , having at least 15 units of the formula ═(OSi[O d H])—, —(OSi[O d H] 2 )— or —(OSi[O d H] 3 ).
6. The compound of claim 5 , wherein d=0.
7. The compound of claim 1 , wherein d=0.
8. The compound of claim 1 , having at least 15 units of the formula ═(OA[O d H])—, —(OA[O d H] 2 )— or —(OA[O d H] 3 ).
9. The compound of claim 8 , wherein d=0.
10. The compound of claim 8 , wherein D is B.
11. The compound of claim 8 , wherein D is P.
12. The compound of claim 8 , wherein R 1 is C 1 -C 6 alkyl or C 6 -C 12 aryl.
13. The compound of claim 8 , wherein R 1 is H or OH.
14. The compound of claim 1 , wherein D is B and c=0, or D is P and c=1.
15. The compound of claim 1 , wherein D is B.
16. The compound of claim 1 , wherein D is P.
17. The compound of claim 1 , wherein R 1 is C 1 -C 6 alkyl.
18. The compound of claim 1 , wherein R 1 is C 6 -C 12 aryl.
19. The compound of claim 18 , wherein R 1 is phenyl.
20. The compound of claim 1 , wherein R 1 is H or OH.