Microelectromechanical sensing structure for a pressure sensor including a deformable test structure
A microelectromechanical sensing structure having a membrane region including a membrane that undergoes deformation as a function of a pressure and a first actuator that is controlled in a first operating mode and a second operating mode, the first actuator being such that, when it operates in the second operating mode, it contacts the membrane region and deforms the membrane in a way different from when it operates in the first operating mode.
1. A system, comprising:
a first die;
a sensor formed in the first die, the sensor including:
a first cavity;
a membrane over the first cavity;
a first actuator over the membrane, the first actuator being configured to operate in a first operating mode and in a second operating mode; and
a cap over the first actuator and over the membrane;
a second cavity formed by the cap, the first actuator being in the second cavity.
2. The system of claim 1 , further comprising a second die, the cap being formed by the second die.
3. The system of claim 1 wherein the first actuator includes a first electrically conductive portion that is partially in the second cavity and partially outside of the second die, the second die in contact with a middle part of the first electrically conductive portion.
4. The system of claim 1 , further comprising:
an electronic unit electrically coupled to the sensor; and
a speaker electrically coupled to the electronic unit.