Microstructure plating systems
Microstructure plating systems and methods are described herein. One method includes depositing a plating-resistant material between a microstructure and a bonding layer, wherein the microstructure comprises a plating process base material and immersing the microstructure in a plating solution.
1. A system, comprising:
a microstructure sensor comprised of plating process base material with an isotropic plated metal covering that is applied when the microstructure sensor is released from a dielectric material; and
a wafer connection between the plated microstructure sensor released from the dielectric material and a non-plated circuitry within the dielectric material, wherein the connection and the non-plated circuitry are separated by a plating resistant material.
2. The system of claim 1 , wherein the microstructure sensor is released from a mechanical support layer via a chemical etch.
3. The system of claim 1 , wherein the plating resistant material is silicon nitride.
4. The system of claim 1 , wherein the plating process base material comprises one of: silicon, aluminum, or copper.
5. The system of claim 1 , wherein the non-plated circuitry is subject to damage beyond a predetermined temperature threshold or time-temperature exposure budget.
6. The system of claim 1 , wherein the plating resistant material is an etch stop material.
7. The system of claim 1 , wherein the metal covering comprises gold.
8. A system, comprising:
a microstructure sensor comprised of plating process base material with an isotropic plated metal covering the plating process base material, wherein the isotropic plated covering is applied when the microstructure sensor is released from a dielectric material; and
a bonding layer coupling the microstructure sensor released from the dielectric material to circuitry within the dielectric material, wherein the bonding layer and the microstructure sensor are separated by a plating resistant material.
9. The system of claim 8 , wherein the circuitry comprises a number of vias comprising a conductive material.
10. The system of claim 8 , wherein the microstructure sensor is released from a dielectric material.
11. The system of claim 8 , wherein the isotropic plated material is plated on the plating process base material via immersion in a plating solution.
12. The system of claim 8 , wherein the plating process base material comprises at least one of: titanium nitride (TiN), tantalum nitride (TaN), or a combination thereof.
13. The system of claim 8 , wherein the bonding layer includes a number of bonding wafers to couple the microstructure sensor to the circuitry.
14. The system of claim 13 , wherein a first bonding wafer of the number of bonding wafers is placed in contact with a second bonding wafer to bond the first bonding wafer and second bonding wafer into a single bonding wafer.
15. A microstructure sensor, comprising:
a number of cantilevered beam structures comprised of plating process base material with an isotropic plated metal covering the plating process base material, wherein the isotropic plated covering is applied when the microstructure sensor is released from a dielectric material; and
a number of bonding wafers to couple the number of cantilevered beam structures released from the dielectric material to circuitry within the dielectric material, wherein the number of bonding wafers and circuitry are separated from the number of cantilevered beam structures by an etch stop material.
16. The microstructure sensor of claim 15 , wherein the isotropic plated metal covering is applied to the plating process base material after the number of bonding wafers couple the number of cantilevered beam structures to circuitry.
17. The microstructure sensor of claim 15 , wherein the circuitry includes a number of interconnects, inductors, and capacitors.
18. The microstructure sensor of claim 15 , wherein the number of bonding wafers provide a wafer-to-wafer bond between the number of cantilevered beam structures and the circuitry.
19. The microstructure sensor of claim 15 , wherein the number of bonding wafers provide a wafer-to-die bond between the number of cantilevered beam structures and the circuitry.
20. The microstructure sensor of claim 15 , wherein the etch stop material is a material that is not removed by an etching process.