Shadow mask, method of manufacturing a shadow mask and method of manufacturing a display device using a shadow mask
A shadow mask is used for patterning in a film deposition process in which a film deposition material is deposited by vapor deposition or sputtering. The shadow mask includes a first resin film provided on a side facing a film deposition target, a metal part having a slit formed therein and provided on top of the first resin film, and a second resin film provided in such a way as to cover at least a part of a top of the metal part. The second resin film is provided on a side exposed to a film deposition material, and a surface of the second resin film is roughened.
1. A shadow mask comprising:
a first resin film provided on a side facing a film deposition target;
a metal part having a slit formed therein and provided on top of the first resin film; and
a second resin film provided in such a way as to cover at least a part of a top of the metal part,
wherein the second resin film is provided on a side exposed to a film deposition material, and a surface of the second resin film is roughened.
2. The shadow mask according to claim 1 , wherein the second resin film has an opening corresponding to a pattern to be prepared, at a position overlapping with the slit, and is formed in such a way as to cover the first resin film and the metal part.
3. The shadow mask according to claim 1 , wherein the first resin film has an opening corresponding to a pattern to be prepared, at a position overlapping with the slit, and
the second resin is formed in such a way as to cover the metal part.
4. The shadow mask according to claim 1 , wherein the surface of the second resin film is roughened by a laser beam.
5. The shadow mask according to claim 1 , wherein the surface of the second resin film is roughened by ashing.
6. The shadow mask according to claim 1 , wherein the second resin film is thinner than the first resin film.
7. A method of manufacturing a shadow mask, the method comprising steps of:
forming a first resin film on a base;
bonding a metal part having a slit provided therein onto the first resin film;
eliminating the first resin film formed at a part of an area where the slit is provided;
forming a second resin film in such a way as to cover the metal part, the first resin film, and the base;
roughening a surface of the second resin film;
forming an opening corresponding to a pattern to be prepared, in the second resin film; and
eliminating the base.
8. A method of manufacturing a display device, the method comprising steps of:
forming a first resin film on a base;
bonding a metal part having a slit provided therein onto the first resin film;
eliminating the first resin film formed at a part of an area where the slit is provided;
forming a second resin film in such a way as to cover the metal part, the first resin film, and the base;
roughening a surface of the second resin film;
forming an opening corresponding to a pattern to be prepared, in the second resin film;
eliminating the base and obtaining a shadow mask; and
forming a film of the pattern in a display panel, using the shadow mask.