TFT substrate including additional metal layer for reducing electrical resistance and manufacturing method thereof
View Patent ↗A TFT substrate and a manufacturing method thereof are provided. The TFT substrate includes a plurality of vias formed in a second insulation layer that is formed on a second metal layer that forms peripheral signal wiring traces of the TFT substrate so as to line up in an extension direction of each of the peripheral signal wiring traces and a third metal layer that is formed on the second insulation layer at a location corresponding to each of the peripheral signal wiring traces such that the third metal layer is connected, through the vias, with each of the peripheral signal wiring traces to thereby reduce the electrical resistance of each of the peripheral signal wiring traces and thus lowering down power consumption of control ICs and improving capability of the TFT substrate for resisting electrostatic discharge.
1. A thin-film transistor (TFT) substrate, comprising: a backing plate, a first insulation layer arranged on the backing plate, a second metal layer arranged on the first insulation layer, a second insulation layer set on and covering the second metal layer and the first insulation layer, a third metal layer arranged on the second insulation layer, and a third insulation layer set on and covering the third metal layer and the second insulation layer;
wherein the second metal layer comprises a plurality of peripheral signal wiring traces; the second insulation layer comprises, at locations above and corresponding to each of the peripheral signal wiring traces, a plurality of vias arranged in an extension direction of each of the peripheral signal wiring traces and extending through the second insulation layer; the third metal layer is formed at a location corresponding to each of the metal wiring traces and is electrically connected, through the vias, with each of the peripheral signal wiring traces;
wherein the plurality of peripheral signal wiring traces comprise high level direct-current (DC) signal lines, low level DC signal lines, and clock signal lines of a gate-driver-on-array (GOA) circuit and grounding lines of the TFT substrate and wherein the plurality of vias are formed through the second insulation layer as being distributed along each of the peripheral signal wiring traces.
2. The TFT substrate as claimed in claim 1 , wherein the first insulation layer comprises, stacked from bottom to top, a buffer layer, a gate insulation layer, and an interlayer dielectric layer.
3. The TFT substrate as claimed in claim 1 , wherein the second insulation layer comprises, stacked from bottom to top, a planarization layer and a top insulation layer.
4. The TFT substrate as claimed in claim 2 , wherein a first metal layer is arranged between the interlayer dielectric layer and the gate insulation layer.