Magnetic memory and manufacturing method of the same
According to one embodiment, a magnetic memory includes a first magnetic layer, a second magnetic layer, a non-magnetic intermediate layer provided between the first magnetic layer and the second magnetic layer and an underlying layer provided on an opposite side of the first magnetic layer with respect to the intermediate layer, and the underlying layer contains AlN of a hcp structure.
1. A magnetic memory comprising:
a first magnetic layer;
a second magnetic layer;
a non-magnetic intermediate layer provided between the first magnetic layer and the second magnetic layer;
an underlying layer provided on an opposite side of the first magnetic layer with respect to the non-magnetic intermediate layer, the underlying layer containing AlN of a hcp structure; and
a buffer layer provided on an opposite side of the underlying layer with respect to the first magnetic layer;
wherein the first magnetic layer (i) is a recording layer in which a direction of magnetization is variable and (ii) is directly on the AlN of the underlying layer, and
wherein the buffer layer is of a hcp structure having a (001) orientation, a bcc structure having a (110) orientation, or an fcc structure having a (111) orientation.
2. The magnetic memory of claim 1 , wherein the underlying layer has the (001) orientation.
3. The magnetic memory of claim 1 , wherein the buffer layer comprises one of Hf, Mg and Zr having the hcp structure, one of Nb, Mo, Ta and W having the bcc structure, or one of HfN, TiN, MoN, ZrN, TiB, HfB, ZrB and MgO having the fcc structure.
4. The magnetic memory of claim 3 , wherein the buffer layer comprises one of Hf, Sc, Y, Zr, Gd, Tb and Dy as an additive element.
5. The magnetic memory of claim 1 , further comprising a lower electrode on an opposite side of the buffer layer with respect to the underlying layer.
6. The magnetic memory of claim 5 , further comprising a selection transistor connected to the lower electrode.
7. The magnetic memory of claim 1 , wherein the underlying layer has a thickness of 0.2 to 2 nm.
8. The magnetic memory of claim 1 , wherein the second magnetic layer is a reference layer in which a direction of magnetization is invariable, and the non-magnetic intermediate layer is a barrier layer.
9. The magnetic memory of claim 8 , wherein the recording layer and the reference layer are ferromagnetic materials containing one of Co, Fe and Ni, and the barrier layer comprises MgO.
10. The magnetic memory according to claim 1 , wherein the buffer layer is NaCl having a (111) orientation.
11. A magnetic memory comprising:
a first magnetic layer;
a second magnetic layer;
a non-magnetic intermediate layer provided between the first magnetic layer and the second magnetic layer;
an underlying layer provided on an opposite side of the first magnetic layer with respect to the non-magnetic intermediate layer, the underlying layer containing AlN; and
a buffer layer provided on an opposite side of the underlying layer with respect to the first magnetic layer, the buffer layer comprising one selected from Hf, Mg, Zr, Nb, Mo, Ta, W, HfN, TiN, MoN, ZrN, TiB, HfB, ZrB and MgO,
wherein the first magnetic layer (i) is a recording layer in which a direction of magnetization is variable and (ii) is directly on the AlN of the underlying layer,
wherein the underlying layer has a hcp structure having an (001) orientation, and
wherein the buffer layer comprises one of Hf, Mg and Zr of an hcp structure having the (001) orientation, one of Nb, Mo, Ta and W of a bcc structure having a (110) orientation, or one of HfN, TiN, MoN, ZrN, TiB, HfB, ZrB and MgO having of an fcc structure having a (111) orientation.
12. The magnetic memory of claim 11 , wherein the buffer layer comprises one of Hf, Sc, Y, Zr, Gd, Tb and Dy as an additive element.
13. The magnetic memory of claim 11 , further comprising a lower electrode on an opposite side of the buffer layer with respect to the underlying layer.
14. The magnetic memory of claim 11 , wherein the underlying layer has a thickness of 0.2 to 2 nm.
15. The magnetic memory of claim 11 , wherein the second magnetic layer is a reference layer in which a direction of magnetization is invariable, and the non-magnetic intermediate layer is a barrier layer.
16. The magnetic memory of claim 15 , wherein the recording layer and the reference layer are ferromagnetic materials containing one of Co, Fe and Ni, and the barrier layer comprises MgO.