Holder for a substrate cassette and device provided with such a holder
View Patent ↗A holder is disclosed for a cassette for substrates. The holder includes a base plate on which a guide member provided with at least two guides is secured. The cassette is to be positioned between the guides, which enable the cassette to be aligned with respect to the base plate, and the side of which facing the base plate tapers inwards and downwards. The application of such a holder in an apparatus for manufacturing semiconductor devices is still hampered as a result of incorrectly positioning the holder in the apparatus. This can lead to damage to the substrates and a lower yield of the manufacturing process. The side of the guide member tapers inwards and upwards. By virtue of this structure, the cassette can be positioned more accurately and reproducibly into the holder. In this way, damage to substrates is avoided and the yield is high. The guide member may be mirror symmetrical and can include two separate guide members, which are mirror symmetrical as well. As a result, the holder can be mounted, adjusted and manufactured in a simple and inexpensive manner.
1. A cassette holder arrangement, the holder arrangement comprising:
a cassette to hold at least one semiconductor material substrate;
a base plate; and
a guide member located over and supported by the base plate, the guide member having cassette-directed guides for aligning the cassette along substantially perpendicular axes over the base plate, each cassette-directed guide having a respective end portion protruding to secure the cassette with respect to the base plate upon introduction to the holder arrangement,
wherein the respective end portion of each guide has a first side of the guide member which is facing away from the base plate and a second side of the guide member facing toward the base plate, the first and second sides tapered toward one another in a direction toward the protruding end portion so as to form the respective protruding end portion, and arranged at a predetermined distance from the cassette so as to accurately hold the cassette in alignment on the base plate within the predetermined distance of the guides from the cassette; and wherein, viewed in cross-section, the guides demonstrate a trapezoidal, inwardly directed profile.
2. The holder arrangement as claimed in claim 1 , wherein the second side facing the base plate is mirror symmetrical with respect to the first side facing away from the base plate.
3. The holder arrangement as claimed in claim 1 , wherein the guide member includes at least three cassette-directed guides wherein two of the guides oppose each other from opposite ends of the guide member and the third is located along the length of the guide member.
4. The holder arrangement as claimed in claim 3 , wherein the guide member is detachably secured to the base plate by means of bolts and nuts and wherein the base plate is graduated at a location of two mutually perpendicular outer sides of the guide member.
5. The holder arrangement as claimed in claim 4 , wherein the base plate, the bolts and the nuts are made of aluminum.
6. The holder arrangement as claimed in claim 1 , further including a second guide member constructed and arranged opposite and identical to the first guide member to mirror the first guide member.
7. The holder arrangement as claimed in claim 1 , wherein the guide member is made from a polyethylene material having a low coefficient of friction.