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App. No. 10/073,562 · Confirmation No. 5160

STRAINED SI BASED LAYER MADE BY UHV-CVD, AND DEVICES THEREIN

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-08-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-02-11 TRNA Transmittal of New Application 2 View
2002-02-11 SPEC Specification 21 View
2002-02-11 CLM Claims 9 View
2002-02-11 ABST Abstract 1 View
2002-02-11 DRW Drawings-only black and white line drawings 11 View
2002-02-11 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/073,562
Filed
2002-02-11
Granted
2003-11-18
Pub. No.
US20030153161A1
Art Unit
2812
PTA
0 days