Method for manufacturing an optical module and optical module
View Patent ↗The invention relates to an optical module and to method for manufacturing an optical module comprising the steps of: providing a groove in a substrate for positioning an optical component, providing the optical component, bonding the optical component to the groove by means of an aluminium-oxide bonding process, whereby an aluminium layer is formed on a lower portion of the optical component.
1. A method of manufacturing an optical module, the method comprising:
providing a groove in a first side of a substrate for positioning a ball lens, wherein the groove is configured to create an opening in a second side of the substrate;
placing the ball lens in the groove, wherein the ball lens has an oxide coating; and
depositing an aluminum layer on the second side of the substrate that extends through the opening to a lower portion of the optical component, wherein the optical component is secured within the groove by means of an aluminum-oxide bonding process.
2. The method of claim 1 , further comprising the step of heating the aluminum layer to increase the strength of the aluminum-oxide bond.
3. The method of claim 1 , further comprising the step of adding an additional metal layer to the aluminum layer on the second side of the substrate to increase the strength of the optical module.
4. The method of claim 1 , wherein the oxide coating comprises silicon oxide.
5. The method of claim 1 , wherein the groove is anisotropically etched into the substrate.
6. A method of manufacturing an optical module, the method comprising:
forming a groove in a substrate for positioning a ball lens;
forming an oxide layer in the groove;
depositing an aluminum layer on a lower portion of the ball lens, wherein the step of depositing includes:
placing each of a plurality of ball lenses in a corresponding opening in a first side of a grid, wherein each opening has a diameter, D, such that a lower portion of each ball lens delimited by the diameter, D, extends through the first side of the grid to a second side of the grid, wherein the plurality of ball lenses includes the first ball lens, and
depositing an aluminum layer on the second side of the grid such that only the lower portion of each ball lens delimited by the diameter, D, receives an aluminum coating wherein the diameter, D, is configured such that the aluminum coating do not cover the optical axes of the ball lenses;
placing the first ball lens in the groove such that the aluminum coating on the lower portion of the first ball lens contacts the oxide layer; and
using a thermo-compression bonding process to create an aluminum-oxide bond to secure the first ball lens within the groove.
7. The method of claim 6 , wherein the oxide coating comprises silicon oxide.
8. The method of claim 6 , wherein the groove is anisotropically etched into the substrate.
9. The method of claim 6 , wherein the first ball lens is placed in the groove using a pick-and-place means.
10. The method of claim 6 , wherein the step of depositing the aluminum layer includes placing the grid in a deposition chamber to deposit the aluminum layer.
11. The method of claim 6 , wherein a temperature on the order of 300 degrees Celsius applied during the thermo-compression bonding process.
12. The method of claim 6 , wherein the thermo-compression bonding process includes applying pressure such that an aluminum oxide layer formed on the first ball lens during the step of placing is cracked in order to bring pure aluminum deposited on the first ball lens into contact with silicon dioxide formed in the groove.