Self-assembled monolayer etch barrier for indium-tin-oxide useful in manufacturing thin film transistor-liquid crystal displays
View Patent ↗New etch barriers of indium-tin-oxide in the manufacturing process of thin film transistor-liquid crystal display are self-assembled monolayers, such as n-alkylsilanes. A typical process of applying a self-assembled monolayer is to ink a hydrolyzed n-octadecyltrimethoxysilane solution on to a stamp and then to transfer the solution onto ITO. The surface of the stamp may be polar enough to be wet with polar self-assembled monolayer solutions of an akylsilane. A non-polar stamp surface may be treated with oxygen plasma to obtain a wettable polar surface.
1. A process for forming an etch pattern on a layer of indium-tin-oxide, comprising:
applying a self-assembled monolayer comprising an alkysilane onto the indium-tin-oxide; and
etching the indium-tin-oxide to form the etch pattern.
2. The process of claim 1 , comprising:
inking a stamp with a polar SAM precursor alkylsilane solution; and
transferring the solution onto the indium-tin-oxide.
3. The process of claim 2 , further comprising;
treating a surface of the stamp so that it is wettable with SAM precursor solutions.
4. The process of claim 3 , wherein the treatment includes exposing the surface to a plasma.
5. The process of claim 4 , wherein the plasma is formed from a gas consisting of at least one selected from the group of oxygen, nitrogen, ammonia, helium, argon, and fluorinated gases.
6. The process of claim 1 , wherein the alkylsilane is selected from the group consisting of:
n-dodecylsilane, n-tetradecylsilane, n-hexadecylsilane, n-octadecylsialne, alkylchlorosilanes, alkylmethoxysilanes, and alkylethoxysilanes.
7. The process of claim 1 , wherein the alkylsilane is n-octadecyltrihydroxysilane.
8. The process of claim 7 , further comprising hydrolyzing n-octadecyltrimethoxysilane to form the n-octadecyltrihydroxysilane.
9. The process of claim 1 , wherein the etching is performed using an acid.
10. The process of claim 9 , wherein the acid is oxalic acid.