Alignment diffractometer
View Patent ↗The invention is concerned with a method f alignment for aligning crystal planes of a wafer substrate ( 40 ) to lithographic features thereon, the method characterized in that it includes the steps of: (a) measuring angular orientation of a peripheral flat ( 200 ) of the substrate ( 40 ); (b) measuring a crystallographic plane orientation of the substrate ( 40 ); (c) determining an error angle (φ) between the annular orientation of the flat ( 200 ) and the crystallographic orientation; (d) angularly registering to the flat ( 200 ) in a lithographic tool; (e) rotating the substrate ( 40 ) by the error angle (φ); and (f) defining one or more feature layers on the substrate ( 40 ) using the lithographic tool, thereby angularly aligning the one or more feature layers to the crystallographic plane orientation. The invention is further concerned with an apparatus for performing a method of alignment as claimed in claim 1 , the apparatus comprising: (a) a wafer flat measuring device ( 20 ) for measuring angular orientation of one or more peripheral flats ( 200 ) on a wafer substrate ( 40 ); (b) an X-ray diffractometer for measuring a crystallographic orientation of the substrate ( 40 ); and (c) a wafer chuck ( 100 ) for rotating the substrate relative to the wafer flat measuring device ( 1 ) and the X-ray diffractometer ( 30 ).
1. A method of alignment crystal planes of a wafer substrate to lithographic features thereon, the method comprising the steps of:
(a) measuring an angular orientation of a peripheral flat of the substrate;
(b) measuring a crystallographic plane orientation of the substrate; and
(c) determining an error angle between the angular orientation of the flat and the crystallographic orientation; and subsequently:
(d) angularly registering to the flat in a lithographic tool; then:
(e) rotating the substrate by the error angle; and then:
(f) defining one or more feature layers on the substrate using the lithographic tool, thereby angularly aligning the one or more feature layers to the crystallographic plane orientation.
2. A method according to claim 1 , wherein the error angle is a parameter which accompanies the wafer substrate through subsequent production processes.
3. A method according to claim 2 , wherein step (f) of claim 1 further comprises the step of employing subsequent production processes.
4. A method according to claim 1 , wherein step (b) further comprises the step of measuring the crystallographic plane orientation using X-ray diffraction means.
5. A method according to claim 4 , further comprising the step of employing the X-ray diffraction means to interrogate a peripheral edge of the substrate.
6. A method according to claim 4 , wherein the X-ray diffraction means comprises an X-ray source for generating X-ray radiation, a beam conditioner for forming the X-ray radiation into an X-ray beam directed towards the substrate, and an X-ray detector for receiving a diffracted portion of the beam emitted from the substrate.
7. A method according to claim 6 , further comprising the step of determining the crystallographic plane orientation by maximizing an X-ray radiation count in the detector as the substrate is rotated.
8. An apparatus for performing a method of alignment for aligning a wafer substrate, the apparatus comprising:
(a) first measuring means for measuring an angular orientation of one or more peripheral flats on a wafer substrate;
(b) second measuring means for measuring a crystallographic orientation of the substrate, the second measuring means comprising an X-ray diffractometer device adapted to measure the crystallographic orientation of the substrate by maximizing an X-ray radiation count; and
(c) substrate rotating means for rotating the substrate relative to the first and second measuring means.
9. An apparatus according to claim 8 , wherein the second measuring means is an X-ray diffractometer device.
10. An apparatus according to claim 8 , further comprising a lithographic tool by which one or more feature layers may be defined on the wafer substrate.
11. An apparatus according to claim 10 , wherein the lithographic tool is arranged to define the one or more feature layers on the wafer substrate when the wafer substrate has been aligned by means of orientation measurements made by the first and second measuring means and by means of rotation by the substrate rotating means, the rotation being dependent upon the orientation measurements of the first and second measuring means.
12. An apparatus according to claim 8 , further comprising means for determining an angular error between a wafer flat on the wafer substrate and the crystallographic orientation of the wafer substrate.