Polarization rotators
View Patent ↗An improved method is provided for fabricating a polarisation rotator in a rib waveguide having a propagation axis and opposite side walls. The method includes etching a pit in the substrate surface to form a recess in one of the side walls of the waveguide, during formation of the waveguide on the substrate surface, so as to provide an asymmetric waveguide section for imparting polarisation rotation to radiation propagated along the propagation axis. Preferably the pit is formed by a wet etching step forming an upper side surface within the recess that is inclined relative the waveguide side walls, and the waveguide side walls are formed by a dry etching step to extend perpendicularly to the substrate surface. In addition the dry etching step forms a lower side surface adjoining the upper side surface within the recess and tilted relative to the upper side surface. Such a method is significantly simplified as compared with prior art production methods, as well as providing greater yield and more predictable device performance since mask alignment errors no longer affect the design parameters of the rotator.
1. A method of fabricating a polarisation rotator comprising a substrate, a rib waveguide on a surface of the substrate having a propagation axis and opposite side walls, a recess in one of the side walls of the waveguide to provide an asymmetric waveguide section for imparting polarisation rotation to radiation propagating along the propagation axis, the recess providing a first side surface within the recess, and an etch pit adjacent said one side wall providing a second side surface adjoining the first side surface and tilted relative to the first side surface,
the method including the steps of, during formation of the waveguide on the surface of the substrate, etching the etch pit in the substrate surface so as to form the recess in one of the side walls of the waveguide forming the asymmetric waveguide section for imparting polarisation rotation to radiation propagated along the propagation axis, the etching forming the first side surface within the recess, and the side walls of the waveguide being formed by a side wall etching step, wherein the side wall etching step additionally forms the second side surface adjoining the first side surface and tilted relative to the first side surface.
2. A method according to claim 1 , wherein the etching steps comprise two wet etching steps having different etching properties.
3. A method according to claim 1 , wherein, in the side wall etching step, dry etching is performed with only the area in which the waveguide is to be formed masked so as to etch those parts of the substrate surface on either side of that area.
4. A method according to claim 1 , wherein, in the pit etching step, a wet etching mask is applied to the substrate surface so as to cover selected parts of the substrate surface and wet etching is then performed to etch the pit in the part of the substrate surface not covered by the mask.
5. A method according to claim 4 , wherein the wet etching mask is formed by a patterned layer of photoresist that is removed after wet etching.
6. A method according to claim 1 , wherein the etching steps comprise wet and dry etching steps.
7. A method according to claim 6 , wherein the pit etching step is a wet etching step and the side wall etching step is a dry etching step.
8. A method according to claim 6 , wherein the pit etching step is a dry etching step and the side wall etching step is a wet etching step.
9. A method according to claim 1 , wherein, in forming the waveguide, a patterned masking layer is applied to the substrate to define the shape of the waveguide to be etched.
10. A method according to claim 9 , wherein the patterned masking layer is formed by applying a layer of masking material to the substrate surface, covering the layer with photoresist, patterning the photoresist, etching the layer using the photoresist as a mask and removing the photoresist.
11. A method according to claim 9 , wherein the patterned masking layer is removed after the etching of the waveguide.
12. A method according to claim 2 , wherein the patterned masking layer is a layer of silica, silicon nitride or silicon oxynitride.