Semiconductor device and method for fabricating the same
View Patent ↗Described is a method for fabricating a semiconductor device having an FET of a trench-gate structure obtained by disposing a conductive layer, which will be a gate, in a trench extended in the main surface of a semiconductor substrate, wherein the upper surface of the trench-gate conductive layer is formed equal to or higher than the main surface of the semiconductor substrate. In addition, the conductive layer of the trench gate is formed to have a substantially flat or concave upper surface and the upper surface is formed equal to or higher than the main surface of the semiconductor substrate. Moreover, after etching of the semiconductor substrate to form the upper surface of the conductive layer of the trench gate equal to or higher than the main surface of the semiconductor substrate, a channel region and a source region are formed by ion implantation. The semiconductor device thus fabricated according to the present invention is free from occurrence of a source offset.
1. A semiconductor device including a trench-gate MISFET, comprising:
a semiconductor body having a first conduction type;
a drain region of the trench-gate MISFET having the first conduction type, formed over the semiconductor body;
a base region of the trench gate MISFET having a second conduction type which is opposite to the first conduction type, formed over the drain region,
a source region of the trench-gate MISFET having the first conduction type, formed over the base region;
a trench extending from an upper surface of the source region to the drain region;
a gate insulating film of the trench-gate MISFET formed on an inner wall of the trench;
a gate electrode of the trench-gate MISFET formed on the gate insulating film;
an insulating film formed over the source region and gate electrode,
a contact hole formed in the insulating film and exposing the base region and an upper surface and a side surface of the source region; and
a source wiring formed in the contact hole and electrically connected with the source region and base region;
wherein the contact hole is comprised of a lower portion and an upper portion;
the lower portion of the contact hole penetrates the source region and reaches the base region;
the lower portion of the contact hole reaches a side surface of the source region; and
the upper portion of the contact hole reaches the upper surface of the source region.
2. The semiconductor device according to claim 1 , wherein a width of the upper portion of the contact hole is larger than that of the lower portion of the contact hole.
3. The semiconductor device according to the claim 1 , wherein the first and second conduction types are an n type and a p type, respectively.
4. The semiconductor device according to claim 1 , wherein a channel is formed in the base region.
5. The semiconductor device according to claim 1 , wherein the semiconductor device has a plurality of the trench gate MISFETs, the source regions, base regions, and drain regions of the plurality of the trench-gate MISFETs are electrically connected respectively, and the plurality of the trench-gate MISFETs comprise a power MISFET.
6. The semiconductor device according to claim 1 , wherein a drain electrode is formed over a back surface of the semiconductor body; and the drain electrode and the drain region are electrically connected.
7. The semiconductor device according to claim 1 , wherein a contact layer is formed in the base region;
the contact layer and the base region have a same conduction type;
an impurity concentration of the contact layer is greater than that of the base region; and
the lower portion of the contact hole reaches the contact layer.
8. The semiconductor device according to claim 1 , wherein the source wiring reaches the upper and side surfaces of the source region.