Semiconductor device
A semiconductor integrated circuit device having a metal thin-film resistance includes a lower insulation film formed over a semiconductor substrate via another lawyer, a metal interconnection pattern formed on the lower insulation film, an underlying insulation film formed on the lower insulation film and the metal interconnection pattern, and a contact hole formed in said underlying insulation film on the metal interconnection pattern, wherein the metal thin-film resistance is formed so as to extend from a top surface of the underlying insulation film to the contact hole in electrical contact with the metal interconnection pattern in the contact hole, at least a part of constituting elements of the semiconductor integrated circuit other than the metal thin-film resistance is disposed in a region underneath the metal thin-film resistance.
1. A semiconductor integrated circuit device, comprising:
a lower insulation film formed over a semiconductor substrate;
a metal interconnection pattern formed over said lower insulation film;
an underlying insulation film formed over said metal interconnection pattern;
a contact hole formed in said underlying insulation film; and
a resistor formed of a metal thin-film over said underlying insulation film so as to extend from a top surface of said underlying insulation film into said contact hole,
wherein said resistor formed of a metal thin-film is in electrical contact with said metal interconnection pattern in said contact hole,
wherein at least a portion of said semiconductor integrated circuit device other than said resistor formed of a metal thin-film is disposed in a region underneath said resistor formed of a metal thin-film, and
wherein said metal interconnection pattern comprises a metal pattern and a refractory metal film formed at least on a top surface of said metal pattern.
2. The semiconductor integrated circuit device as claimed in claim 1 , wherein said metal interconnection pattern is an uppermost metal interconnection pattern.
3. The semiconductor device as claimed in claim 1 , further comprising a laser beam interruption film formed of a metal material in said region underneath said resistor formed of a metal thin-film between said underlying insulation film and said portion of said semiconductor integrated circuit device.
4. The semiconductor integrated circuit device as claimed in claim 1 , wherein said portion of said portion of said semiconductor integrated circuit device disposed in said region underneath said resistor formed of a metal thin-film comprises a transistor.
5. The semiconductor integrated circuit device as claimed in claim 1 , wherein said portion of said semiconductor integrated circuit device disposed underneath said resistor formed of a metal thin-film comprises a capacitor.
6. The semiconductor integrated circuit device as claimed in claim 1 , wherein said constituting elements of said semiconductor integrated circuit disposed underneath said resistor formed of a metal thin-film comprises a metal interconnection pattern.
7. The semiconductor integrated circuit device as claimed in claim 1 , wherein said portion of said semiconductor integrated circuit device disposed underneath said resistor formed of a metal thin-film comprises a polysilicon interconnection pattern.
8. The semiconductor integrated circuit device as claimed in claim 1 , wherein said portion of said semiconductor integrated circuit device disposed underneath said resistor formed of a metal thin-film comprises an impurity diffusion region.
9. The semiconductor integrated circuit device as claimed in claim 1 , wherein said resistor formed of a metal thin-film has a thickness of 5-1000 Angstroms.
10. The semiconductor device as claimed in claim 1 , wherein said underlying insulation film is planarized.
11. A semiconductor integrated circuit device, comprising:
a lower insulation film formed over a semiconductor substrate;
a metal interconnection pattern formed over said lower insulation film;
an underlying insulation film formed over said metal interconnection pattern;
a contact hole formed in said underlying insulation film; and
a resistor formed of a metal thin-film over said underlying insulation film so as to extend from a top surface of said underlying insulation film into said contact hole;
wherein said resistor formed of a metal thin-film is in electrical contact with said metal interconnection pattern in said contact hole,
wherein at least a portion of said semiconductor integrated circuit device other than said resistor formed of a metal thin-film is disposed in a region underneath said resistor formed of a metal thin-film,
wherein said contact hole has a tapered form at least at a top edge part thereof,
wherein said contact hole further comprises a reverse sputtering residue on an inner wall surface of said contact hole, and
wherein said reverse sputtering residue comprises materials of said metal interconnection pattern, materials of said underlying insulation film, and argon.