Concave pattern formation method and method for forming semiconductor device
View Patent ↗A pattern formation method includes the steps of forming a flowable film made of a material with flowability; forming at least one of a concave portion and a convex portion provided on a pressing face of a pressing member onto the flowable film by pressing the pressing member against the flowable film; forming a solidified film by solidifying the flowable film, onto which the at least one of a concave portion and a convex portion has been transferred, through annealing at a first temperature with the pressing member pressed against the flowable film; and forming a pattern made of the solidified film burnt by annealing at a second temperature higher than the first temperature.
1. A method for forming a semiconductor device comprising the steps of:
forming a flowable film made of an insulating material with flowability;
forming a convex portion provided on a pressing face of a pressing member onto said flowable film by pressing said pressing member against said flowable film;
forming a solidified film by solidifying said flowable film, onto which said convex portion has been transferred, through annealing at a first temperature with said pressing member pressed against said flowable film;
forming a pattern having a concave portion in the shape corresponding to said convex portion and made of said solidified film burnt by annealing at a second temperature higher than said first temperature; and
forming at least one of a metal interconnect and a plug by filling said concave portion with a conductive material.
2. The method for forming a semiconductor device of claim 1 ,
wherein said first temperature is approximately 150° C. through approximately 300° C.
3. The method for forming a semiconductor device of claim 1 ,
wherein said second temperature is approximately 350° C. through approximately 450° C.
4. The method for forming a semiconductor device of claim 1 ,
wherein said material with flowability is a photo-setting resin, and
the step of forming a flowable film includes a sub-step of irradiating said flowable film with light.
5. The method for forming a semiconductor device of claim 1 ,
wherein said material with flowability is an organic material, an inorganic material, an organic-inorganic material, a photo-setting resin or a photosensitive resin.
6. The method for forming a semiconductor device of claim 1 ,
wherein in the step of forming a pattern, said solidified film is annealed at said second temperature with said pressing face pressed against said solidified film.
7. The method for forming a semiconductor device of claim 1 ,
wherein in the step of forming a pattern, said solidified film is annealed at said second temperature with said pressing face moved away from said solidified film.
8. The method for forming a semiconductor device of claim 1 ,
wherein said pattern is a porous film.
9. The method for forming a semiconductor device of claim 1 ,
wherein said pattern has a dielectric constant of approximately 4 or less.
10. The method for forming a semiconductor device of claim 1 , further comprising, after the step of forming a pattern and before the step of forming at least one of a metal interconnect and a plug, a step of removing a portion of said pattern remaining on a bottom of said concave portion by etching.