Semiconductor device and method for fabricating the same
View Patent ↗A semiconductor device of the present invention includes a plurality of lower electrodes covering the entire surfaces of a plurality of trenches formed in a first interlayer insulating film, a capacitive insulating film covering the entire surfaces of the plurality of lower electrodes, and an upper electrode covering the surfaces of the plurality of lower electrodes from above with the capacitive insulating film interposed between the upper electrode and the plurality of lower electrodes. The upper electrode is formed with a stress-relieving part, such as a crack, a notch or a recess.
1. A semiconductor device having a plurality of concave capacitors, said device comprising:
an insulating film formed with a plurality of trenches;
a plurality of lower electrodes;
a capacitive insulating film formed on the plurality of lower electrodes; and
an upper electrode covering the surfaces of the plurality of lower electrodes from above with the capacitive insulating film interposed between the upper electrode and the plurality of lower electrodes and having a stress-relieving part,
wherein each said capacitor comprises one of the lower electrodes, the capacitive insulating film and the upper electrode,
each said lower electrode is formed so as to only cover inner surfaces of each said trench in a conforming manner not completely burying said trench,
the upper electrode covers the surfaces of the insulating film located outside the plurality of trenches, and
the stress-relieving part is formed in a part of the upper electrode including the surface thereof and covering the surfaces of the insulating film located outside the plurality of trenches.
2. The semiconductor device of claim 1 , wherein the stress-relieving part is a crack, a notch or a recess.
3. The semiconductor device of claim 1 , wherein the capacitive insulating film contains TaO x or HfO 2 .
4. The semiconductor device of claim 1 , wherein the lower electrodes contain silicon or TiN.
5. The semiconductor device of claim 1 , wherein the upper electrode contains TiN, Pt, WN, TaN, TiAlN, TiSiN or RuO.
6. The semiconductor device of claim 1 , wherein the upper electrode covers the surface of the capacitive insulating film in a conforming manner.